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A platform for research: civil engineering, architecture and urbanism
YTTRIUM OXIDE BASED COATING COMPOSITION
Described herein is a protective coating composition that provides erosion and corrosion resistance to a coated article (such as a chamber component) upon the article's exposure to harsh chemical environment (such as hydrogen based and/or halogen based environment) and/or upon the article's exposure to high energy plasma. Also described herein is a method of coating an article with the protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits, on average, less than about 5 yttrium based particle defects per wafer.
YTTRIUM OXIDE BASED COATING COMPOSITION
Described herein is a protective coating composition that provides erosion and corrosion resistance to a coated article (such as a chamber component) upon the article's exposure to harsh chemical environment (such as hydrogen based and/or halogen based environment) and/or upon the article's exposure to high energy plasma. Also described herein is a method of coating an article with the protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits, on average, less than about 5 yttrium based particle defects per wafer.
YTTRIUM OXIDE BASED COATING COMPOSITION
FIROUZDOR VAHID (author) / BEAUDRY CHRISTOPHER LAURENT (author) / DOH HYUN-HO (author) / BEHNKE JOSEPH FREDERICK (author) / SOMMERS JOSEPH FREDERICK (author)
2021-10-14
Patent
Electronic Resource
English
Preparation method of plasma spraying yttrium oxide coating powder
| European Patent Office | 2022