A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
POLYCRYSTALLINE SIC MOLDED BODY AND METHOD FOR MANUFACTURING SAME
Provided are a polycrystalline SiC compact capable of achieving uniform plasma etching when used as electrodes and a method for manufacturing the same. A polycrystalline SiC compact has a major surface in which Wa (0 to 10 mm) is 0.00 to 0.05 µm or less, Wa (10 to 20 mm) is 0.13 µm or less, and Wa (20 to 30 mm) is 0.20 µm or less.
POLYCRYSTALLINE SIC MOLDED BODY AND METHOD FOR MANUFACTURING SAME
Provided are a polycrystalline SiC compact capable of achieving uniform plasma etching when used as electrodes and a method for manufacturing the same. A polycrystalline SiC compact has a major surface in which Wa (0 to 10 mm) is 0.00 to 0.05 µm or less, Wa (10 to 20 mm) is 0.13 µm or less, and Wa (20 to 30 mm) is 0.20 µm or less.
POLYCRYSTALLINE SIC MOLDED BODY AND METHOD FOR MANUFACTURING SAME
POLYKRISTALLINER SIC-FORMKÖRPER UND VERFAHREN ZUR HERSTELLUNG DAVON
CORPS MOULÉ EN SIC POLYCRISTALLIN ET SON PROCÉDÉ DE FABRICATION
HARADA YOHEI (author) / OISHI JUNYA (author)
2024-09-04
Patent
Electronic Resource
English
IPC:
C23F
Nichtmechanisches Entfernen metallischer Stoffe von Oberflächen
,
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES
/
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C30B
SINGLE-CRYSTAL GROWTH
,
Züchten von Einkristallen
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
POLYCRYSTALLINE SIC MOLDED BODY AND METHOD FOR MANUFACTURING SAME
| European Patent Office | 2024
POLYCRYSTALLINE SIC MOLDED BODY AND METHOD FOR MANUFACTURING SAME
| European Patent Office | 2023