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Aluminum nitride assemblage
An assemblage of a semiconductor processing apparatus is disclosed which comprises a first aluminium nitride (AlN) component and a second aluminium nitride component. The first and second aluminium nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising (a) Y2O3-Al2O3-SiO2 (YAS) glass; (b) crystalline aluminosilicate; and optionally (c) aluminium nitride. The crystalline aluminosilicate may be mullite.
Aluminum nitride assemblage
An assemblage of a semiconductor processing apparatus is disclosed which comprises a first aluminium nitride (AlN) component and a second aluminium nitride component. The first and second aluminium nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising (a) Y2O3-Al2O3-SiO2 (YAS) glass; (b) crystalline aluminosilicate; and optionally (c) aluminium nitride. The crystalline aluminosilicate may be mullite.
Aluminum nitride assemblage
CHENGTSIN LEE (author) / DAVID CARLONI (author)
2023-05-24
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
ALUMINUM NITRIDE POWDER AND ALUMINUM NITRIDE SINTERED COMPACT
| European Patent Office | 2017
TIBKAT | 1.1986 - 41.2000; damit Ersch. eingest.