A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CONDUCTIVE CORROSION-RESISTANT MEMBER, CONDUCTIVE CORROSION-RESISTANT COMPONENT, AND METHOD FOR MANUFACTURING CONDUCTIVE CORROSION-RESISTANT MEMBER
PROBLEM TO BE SOLVED: To provide a conductive corrosion-resistant member and a conductive corrosion-resistant component, which exhibit high versatility and have high conductivity, corrosion resistance against halogen-based corrosive gas or plasma of the gas, and high mechanical strength and thermal shock resistance when applied to various members for an apparatus for manufacturing a semiconductor, and to provide a method for manufacturing a conductive corrosion-resistant member.SOLUTION: The conductive corrosion-resistant member is, in at least a part thereof, exposed to one of or both of halogen-based corrosive gas and plasma of the gas, and comprises a sintered body comprising fibrous carbon and a single material of yttrium oxide particles or metal composite oxide particles prepared by compounding two or more oxides selected from the group consisting of yttrium oxide, aluminum oxide and rare earth oxide. The fibrous carbon has a diameter of over 50 nm and 300 nm or less and a length of 25 μm or less. The sintered body has a relative density that is 97% of the theoretical density.
【課題】半導体製造装置用の各種部材に適用した場合に、汎用性が高く、高い導電性を有し、ハロゲン系腐食性ガス及びこれらのプラズマに対して耐食性を有し、しかも高い機械強度及び熱衝撃耐性を有する導電性耐食部材及び導電性耐食部品並びに導電性耐食部材の製造方法を提供する。【解決手段】本発明の導電性耐食部材は、少なくとも一部がハロゲン系腐食性ガス及びそのプラズマのうちいずれか一方または双方に暴露される導電性耐食部材であり、酸化イットリウム粒子単体、または酸化イットリウム、酸化アルミニウム及び希土類酸化物の群から選択される２種以上を複合化させた金属複合酸化物粒子と、繊維状炭素と、を含有した焼結体からなり、この繊維状炭素の直径は５０ｎｍを超えかつ３００ｎｍ以下、その長さは２５μｍ以下であり、この焼結体の相対密度は、その理論密度の９７％以上である。【選択図】なし
CONDUCTIVE CORROSION-RESISTANT MEMBER, CONDUCTIVE CORROSION-RESISTANT COMPONENT, AND METHOD FOR MANUFACTURING CONDUCTIVE CORROSION-RESISTANT MEMBER
PROBLEM TO BE SOLVED: To provide a conductive corrosion-resistant member and a conductive corrosion-resistant component, which exhibit high versatility and have high conductivity, corrosion resistance against halogen-based corrosive gas or plasma of the gas, and high mechanical strength and thermal shock resistance when applied to various members for an apparatus for manufacturing a semiconductor, and to provide a method for manufacturing a conductive corrosion-resistant member.SOLUTION: The conductive corrosion-resistant member is, in at least a part thereof, exposed to one of or both of halogen-based corrosive gas and plasma of the gas, and comprises a sintered body comprising fibrous carbon and a single material of yttrium oxide particles or metal composite oxide particles prepared by compounding two or more oxides selected from the group consisting of yttrium oxide, aluminum oxide and rare earth oxide. The fibrous carbon has a diameter of over 50 nm and 300 nm or less and a length of 25 μm or less. The sintered body has a relative density that is 97% of the theoretical density.
【課題】半導体製造装置用の各種部材に適用した場合に、汎用性が高く、高い導電性を有し、ハロゲン系腐食性ガス及びこれらのプラズマに対して耐食性を有し、しかも高い機械強度及び熱衝撃耐性を有する導電性耐食部材及び導電性耐食部品並びに導電性耐食部材の製造方法を提供する。【解決手段】本発明の導電性耐食部材は、少なくとも一部がハロゲン系腐食性ガス及びそのプラズマのうちいずれか一方または双方に暴露される導電性耐食部材であり、酸化イットリウム粒子単体、または酸化イットリウム、酸化アルミニウム及び希土類酸化物の群から選択される２種以上を複合化させた金属複合酸化物粒子と、繊維状炭素と、を含有した焼結体からなり、この繊維状炭素の直径は５０ｎｍを超えかつ３００ｎｍ以下、その長さは２５μｍ以下であり、この焼結体の相対密度は、その理論密度の９７％以上である。【選択図】なし
CONDUCTIVE CORROSION-RESISTANT MEMBER, CONDUCTIVE CORROSION-RESISTANT COMPONENT, AND METHOD FOR MANUFACTURING CONDUCTIVE CORROSION-RESISTANT MEMBER
導電性耐食部材及び導電性耐食部品並びに導電性耐食部材の製造方法
HAYASHI SHINTARO (author) / TAKAHASHI KENTARO (author)
2015-06-18
Patent
Electronic Resource
Japanese