A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
METHOD FOR MANUFACTURING PIEZOELECTRIC SENSOR, PIEZOELECTRIC SENSOR, AND PIEZOELECTRIC DEVICE
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric sensor, a piezoelectric sensor, and a piezoelectric device, by which the delamination of a piezoelectric ceramic from a base material can be prevented even in the case that a piezoelectric sensor is set and used on a curved surface.SOLUTION: A method for manufacturing a piezoelectric sensor according to the present invention comprises: a thermal treatment step P1 in which a thermal treatment at a temperature of 1000-1200°C is performed on a piezoelectric ceramic raw material powder including first powder having a first average particle diameter, and second powder having a second average particle diameter relatively larger than the first average particle diameter; a pulverizing step P2 in which the raw material powder subjected to the thermal treatment in the thermal treatment step P1 is pulverized; a slurry-preparation step P3 in which a slurry of the raw material powder subjected to the pulverization in the pulverizing step P2 is prepared; a film formation step P4 in which a film of the slurry prepared in the slurry forming step P3 is formed on a base material to form a raw material layer to be sintered; a sintering step P5 in which the raw material layer to be sintered is sintered into a piezoelectric ceramic precursor; and a polarization step P6 in which a piezoelectric ceramic is produced by performing a polarization process on the piezoelectric ceramic precursor.
【課題】湾曲面に配設して使用する場合であっても、基材からの圧電セラミックスの剥離を防ぐことが可能な圧電センサの製造方法、圧電センサ、及び圧電素子を提供すること。【解決手段】本発明の圧電センサの製造方法は、第１の平均粒径を有する第１粉末、及び前記第１の平均粒径より相対的に平均粒径が大きい第２の平均粒径を有する第２粉末を含む圧電セラミックスの原料粉末を１０００℃以上１２００℃以下で熱処理する熱処理工程Ｐ１と、熱処理工程Ｐ１で熱処理した原料粉末を粉砕する粉砕工程Ｐ２と、粉砕工程Ｐ２で粉砕した原料粉末をスラリー化するスラリー化工程Ｐ３と、スラリー化工程Ｐ３で得られたスラリーを基材上に成膜して焼結原料層を形成する成膜工程Ｐ４と、焼結原料層を焼結して圧電セラミックス前駆体とする焼結工程Ｐ５と、圧電セラミックス前躯体を分極処理して圧電セラミックスを得る分極処理工程Ｐ６と、を含む。【選択図】図４
METHOD FOR MANUFACTURING PIEZOELECTRIC SENSOR, PIEZOELECTRIC SENSOR, AND PIEZOELECTRIC DEVICE
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric sensor, a piezoelectric sensor, and a piezoelectric device, by which the delamination of a piezoelectric ceramic from a base material can be prevented even in the case that a piezoelectric sensor is set and used on a curved surface.SOLUTION: A method for manufacturing a piezoelectric sensor according to the present invention comprises: a thermal treatment step P1 in which a thermal treatment at a temperature of 1000-1200°C is performed on a piezoelectric ceramic raw material powder including first powder having a first average particle diameter, and second powder having a second average particle diameter relatively larger than the first average particle diameter; a pulverizing step P2 in which the raw material powder subjected to the thermal treatment in the thermal treatment step P1 is pulverized; a slurry-preparation step P3 in which a slurry of the raw material powder subjected to the pulverization in the pulverizing step P2 is prepared; a film formation step P4 in which a film of the slurry prepared in the slurry forming step P3 is formed on a base material to form a raw material layer to be sintered; a sintering step P5 in which the raw material layer to be sintered is sintered into a piezoelectric ceramic precursor; and a polarization step P6 in which a piezoelectric ceramic is produced by performing a polarization process on the piezoelectric ceramic precursor.
【課題】湾曲面に配設して使用する場合であっても、基材からの圧電セラミックスの剥離を防ぐことが可能な圧電センサの製造方法、圧電センサ、及び圧電素子を提供すること。【解決手段】本発明の圧電センサの製造方法は、第１の平均粒径を有する第１粉末、及び前記第１の平均粒径より相対的に平均粒径が大きい第２の平均粒径を有する第２粉末を含む圧電セラミックスの原料粉末を１０００℃以上１２００℃以下で熱処理する熱処理工程Ｐ１と、熱処理工程Ｐ１で熱処理した原料粉末を粉砕する粉砕工程Ｐ２と、粉砕工程Ｐ２で粉砕した原料粉末をスラリー化するスラリー化工程Ｐ３と、スラリー化工程Ｐ３で得られたスラリーを基材上に成膜して焼結原料層を形成する成膜工程Ｐ４と、焼結原料層を焼結して圧電セラミックス前駆体とする焼結工程Ｐ５と、圧電セラミックス前躯体を分極処理して圧電セラミックスを得る分極処理工程Ｐ６と、を含む。【選択図】図４
METHOD FOR MANUFACTURING PIEZOELECTRIC SENSOR, PIEZOELECTRIC SENSOR, AND PIEZOELECTRIC DEVICE
圧電センサの製造方法、圧電センサ、及び圧電素子
NANBA KATSUMI (author) / MORI KAZUTAKA (author) / YAMAMOTO YUKO (author)
2015-06-22
Patent
Electronic Resource
Japanese
| European Patent Office | 2017
| European Patent Office | 2022
| European Patent Office | 2015