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CERAMIC-METAL JOINED BODY
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is obtained by joining a ceramic plate to a metallic cooling plate while interposing a joining material therebetween, from the joining material of which gas is not generated when the electrostatic chuck is used at the high temperature equal to or higher than 80°C and which does not deteriorate the thermal uniformity of a wafer to be attracted thereby.SOLUTION: A ceramic plate 22, a metallic cooling plate 28, and an acrylic resin-made double-sided adhesive joining sheet 32 are prepared. The joining sheet 32 is stuck to the upper surface of the cooling plate 28. The cooling plate 28 stuck with the joining sheet 32 is installed in a vacuum dryer. Prebake treatment is performed on the installed joining sheet-stuck cooling plate for 15-40 hours at 120-130°C under 2,000 Pa or lower reduced pressure in the dryer. The joining sheet-stuck cooling plate thus performed is cooled naturally in vacuum. The ceramic plate 22 is layered on the joining sheet 32 stuck to the cooling plate 28 so that the lower surface of the ceramic plate 22 is made coincident with the upper surface of the joining sheet 32. An obtained laminate is packed into a heat-resistant resin bag. The laminate-packed bag is put in an autoclave and treated for several hours under a pressurized and heated condition to obtain the electrostatic chuck 20 (a shower head, a ceramic-metal joined body).
【課題】樹脂からなる接合材を介して接合した静電チャック等で、８０℃以上の高温使用時に接合材からのガス発生を無くし、吸着しているウエハーの均熱性が悪化しない静電チャックの提供。【解決手段】セラミックス製のプレート２２と、冷却板金属製の支持台２８と、アクリル樹脂製で両面粘着性の接合シート３２とを用意し、冷却板２８の上面に接合シート３２を貼り付け、接合シート３２を貼り付けた冷却板２８を真空乾燥機内に設置し、乾燥機内圧力を２０００Ｐａ以下に減圧し、１２０〜１３０℃で１５〜４０時間プリベイク処理を行い、その後真空中で自然冷却し、プリベイク処理後、冷却板２８に貼り付けられた接合シート３２の上面にプレート２２の下面が一致するように積層し、それを耐熱樹脂バッグ中に入れたあとオートクレーブに入れ、加圧加熱下で数時間処理することにより、得たセラミックス−金属接合体（シャワーヘッド，静電チャック２０）。【選択図】図２
CERAMIC-METAL JOINED BODY
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is obtained by joining a ceramic plate to a metallic cooling plate while interposing a joining material therebetween, from the joining material of which gas is not generated when the electrostatic chuck is used at the high temperature equal to or higher than 80°C and which does not deteriorate the thermal uniformity of a wafer to be attracted thereby.SOLUTION: A ceramic plate 22, a metallic cooling plate 28, and an acrylic resin-made double-sided adhesive joining sheet 32 are prepared. The joining sheet 32 is stuck to the upper surface of the cooling plate 28. The cooling plate 28 stuck with the joining sheet 32 is installed in a vacuum dryer. Prebake treatment is performed on the installed joining sheet-stuck cooling plate for 15-40 hours at 120-130°C under 2,000 Pa or lower reduced pressure in the dryer. The joining sheet-stuck cooling plate thus performed is cooled naturally in vacuum. The ceramic plate 22 is layered on the joining sheet 32 stuck to the cooling plate 28 so that the lower surface of the ceramic plate 22 is made coincident with the upper surface of the joining sheet 32. An obtained laminate is packed into a heat-resistant resin bag. The laminate-packed bag is put in an autoclave and treated for several hours under a pressurized and heated condition to obtain the electrostatic chuck 20 (a shower head, a ceramic-metal joined body).
【課題】樹脂からなる接合材を介して接合した静電チャック等で、８０℃以上の高温使用時に接合材からのガス発生を無くし、吸着しているウエハーの均熱性が悪化しない静電チャックの提供。【解決手段】セラミックス製のプレート２２と、冷却板金属製の支持台２８と、アクリル樹脂製で両面粘着性の接合シート３２とを用意し、冷却板２８の上面に接合シート３２を貼り付け、接合シート３２を貼り付けた冷却板２８を真空乾燥機内に設置し、乾燥機内圧力を２０００Ｐａ以下に減圧し、１２０〜１３０℃で１５〜４０時間プリベイク処理を行い、その後真空中で自然冷却し、プリベイク処理後、冷却板２８に貼り付けられた接合シート３２の上面にプレート２２の下面が一致するように積層し、それを耐熱樹脂バッグ中に入れたあとオートクレーブに入れ、加圧加熱下で数時間処理することにより、得たセラミックス−金属接合体（シャワーヘッド，静電チャック２０）。【選択図】図２
CERAMIC-METAL JOINED BODY
セラミックス−金属接合体
AIHARA YASUFUMI (author) / SUGIMOTO HIROYA (author) / TANAKA SHUNSUKE (author) / OBA KYOMA (author) / WAKI JUNYA (author)
2015-07-27
Patent
Electronic Resource
Japanese
| European Patent Office | 2022
METHOD AND DEVICE FOR MANUFACTURING CERAMIC-METAL JOINED BODY, AND CERAMIC-METAL JOINED BODY
| European Patent Office | 2019