A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
METHOD OF RELAXING RESIDUAL STRESS IN CERAMIC-METAL JOINED BODY, CERAMIC-METAL JOINED BODY, AND METHOD OF PRODUCING CERAMIC-METAL JOINED BODY
To provide a joined body of a ceramic member and a metal member, capable of preventing a crack and destruction generated in a cooling/heating cycle accompanied by the use as a circuit board or the like from occurring to the ceramic member, decreasing damage occurring to surfaces of the metal member and the ceramic member, and decreasing residual tensile stress in a vertical direction relative to a joining interface between the ceramic member and the metal member.SOLUTION: In a joined body where a metal member 3 is joined to a surface of a ceramic member 2, compression stress is applied by performing honing, peening, or blasting treatment to a surface of the ceramic member 2 in the vicinity of a joining interface 11 of the ceramic member 2 and a lower end of a side face of the metal member 3, so as to reduce residual tensile stress in a vertical direction relative to the joining interface 11 on a surface of the ceramic member 2 in the vicinity of the joining interface 11.SELECTED DRAWING: Figure 3
【課題】セラミックス部材と金属部材との接合体において、回路基板等としての使用に伴う冷熱サイクルでセラミックス部材にクラックや破壊などが生じにくく、金属部材表面やセラミックス部材表面へのダメージの発生を少なくでき、セラミックス部材の金属部材との接合界面に対して垂直方向の引張残留応力を低減させる。【解決手段】セラミックス部材２の表面に金属部材３が接合された接合体において、セラミックス部材２と金属部材３の側面の下端との接合境界１１近傍におけるセラミックス部材２の表面に、ホーニング、ピーニング、またはブラスティング処理を行って圧縮応力を負荷し、セラミックス部材２の接合境界１１近傍の表面における接合境界１１に対して垂直方向の引張残留応力を低減させる。【選択図】図３
METHOD OF RELAXING RESIDUAL STRESS IN CERAMIC-METAL JOINED BODY, CERAMIC-METAL JOINED BODY, AND METHOD OF PRODUCING CERAMIC-METAL JOINED BODY
To provide a joined body of a ceramic member and a metal member, capable of preventing a crack and destruction generated in a cooling/heating cycle accompanied by the use as a circuit board or the like from occurring to the ceramic member, decreasing damage occurring to surfaces of the metal member and the ceramic member, and decreasing residual tensile stress in a vertical direction relative to a joining interface between the ceramic member and the metal member.SOLUTION: In a joined body where a metal member 3 is joined to a surface of a ceramic member 2, compression stress is applied by performing honing, peening, or blasting treatment to a surface of the ceramic member 2 in the vicinity of a joining interface 11 of the ceramic member 2 and a lower end of a side face of the metal member 3, so as to reduce residual tensile stress in a vertical direction relative to the joining interface 11 on a surface of the ceramic member 2 in the vicinity of the joining interface 11.SELECTED DRAWING: Figure 3
【課題】セラミックス部材と金属部材との接合体において、回路基板等としての使用に伴う冷熱サイクルでセラミックス部材にクラックや破壊などが生じにくく、金属部材表面やセラミックス部材表面へのダメージの発生を少なくでき、セラミックス部材の金属部材との接合界面に対して垂直方向の引張残留応力を低減させる。【解決手段】セラミックス部材２の表面に金属部材３が接合された接合体において、セラミックス部材２と金属部材３の側面の下端との接合境界１１近傍におけるセラミックス部材２の表面に、ホーニング、ピーニング、またはブラスティング処理を行って圧縮応力を負荷し、セラミックス部材２の接合境界１１近傍の表面における接合境界１１に対して垂直方向の引張残留応力を低減させる。【選択図】図３
METHOD OF RELAXING RESIDUAL STRESS IN CERAMIC-METAL JOINED BODY, CERAMIC-METAL JOINED BODY, AND METHOD OF PRODUCING CERAMIC-METAL JOINED BODY
セラミックス－金属接合体の残留応力緩和方法、セラミックス－金属接合体、およびセラミックス－金属接合体の製造方法
TANAKA SHUNICHIRO (author) / OSANAI HIDEYO (author) / TERAMOTO YUKI (author)
2022-04-15
Patent
Electronic Resource
Japanese
METHOD AND DEVICE FOR MANUFACTURING CERAMIC-METAL JOINED BODY, AND CERAMIC-METAL JOINED BODY
| European Patent Office | 2019
CERAMIC JOINED BODY AND METHOD FOR PRODUCING CERAMIC JOINED BODY
| European Patent Office | 2019
CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
| European Patent Office | 2023