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THIN FILM MAGNETIC HEAD SUBSTRATE, MAGNETIC HEAD SLIDER, AND HARD DISK DRIVE DEVICE
PROBLEM TO BE SOLVED: To provide an AlTiC-based substrate for thin film magnetic head substrate which is high in productivity and low in thermal conductivity.SOLUTION: An AlO-TiC-based thin film magnetic head substrate includes an AlOphase and a TiC phase. The AlOphase has a c-axis lattice constant of 12.998 Å or more and 13.006 Å or less, and the TiC phase has a lattice constant of 4.297 Å or more and 4.325 Å or less. The use of the AlTiC substrate as the thin film magnetic head substrate allows precise processing of ABS at a nanometer level, a floating amount to be accurately controlled, and reduces the thermal conductivity, thus suitable for a smaller and large capacity HDD.
【課題】生産性が高く、熱伝導性が低い薄膜磁気ヘッド用基板用ＡｌＴｉＣ系基板を提供する。【解決手段】Ａｌ2Ｏ3−ＴｉＣ系薄膜磁気ヘッド用基板は、Ａｌ2Ｏ3相とＴｉＣ相とを含んでおり、Ａｌ2Ｏ3相のｃ軸の格子定数が１２．９９８Å以上１３．００６Å以下であり、かつ、ＴｉＣ相の格子定数が４．２９７Å以上４．３２５Å以下である。前記ＡｌＴｉＣ基板を薄膜磁気ヘッド基板に用いることで、ＡＢＳをナノレベルに正確に加工でき、浮上量が精度良く制御され、熱伝導性を低くできるので、ＨＤＤの小型化・大容量化に適する。【選択図】図４
THIN FILM MAGNETIC HEAD SUBSTRATE, MAGNETIC HEAD SLIDER, AND HARD DISK DRIVE DEVICE
PROBLEM TO BE SOLVED: To provide an AlTiC-based substrate for thin film magnetic head substrate which is high in productivity and low in thermal conductivity.SOLUTION: An AlO-TiC-based thin film magnetic head substrate includes an AlOphase and a TiC phase. The AlOphase has a c-axis lattice constant of 12.998 Å or more and 13.006 Å or less, and the TiC phase has a lattice constant of 4.297 Å or more and 4.325 Å or less. The use of the AlTiC substrate as the thin film magnetic head substrate allows precise processing of ABS at a nanometer level, a floating amount to be accurately controlled, and reduces the thermal conductivity, thus suitable for a smaller and large capacity HDD.
【課題】生産性が高く、熱伝導性が低い薄膜磁気ヘッド用基板用ＡｌＴｉＣ系基板を提供する。【解決手段】Ａｌ2Ｏ3−ＴｉＣ系薄膜磁気ヘッド用基板は、Ａｌ2Ｏ3相とＴｉＣ相とを含んでおり、Ａｌ2Ｏ3相のｃ軸の格子定数が１２．９９８Å以上１３．００６Å以下であり、かつ、ＴｉＣ相の格子定数が４．２９７Å以上４．３２５Å以下である。前記ＡｌＴｉＣ基板を薄膜磁気ヘッド基板に用いることで、ＡＢＳをナノレベルに正確に加工でき、浮上量が精度良く制御され、熱伝導性を低くできるので、ＨＤＤの小型化・大容量化に適する。【選択図】図４
THIN FILM MAGNETIC HEAD SUBSTRATE, MAGNETIC HEAD SLIDER, AND HARD DISK DRIVE DEVICE
薄膜磁気ヘッド用基板、磁気ヘッドスライダ、および、ハードディスクドライブ装置
HARA YUSUKE (author) / AJITOMI SHINZO (author) / MATSUO SHIGERU (author) / SAKUMICHI HIDETAKA (author)
2016-01-21
Patent
Electronic Resource
Japanese
SUBSTRATE FOR THIN FILM MAGNETIC HEAD, MAGNETIC HEAD SLIDER, AND HARD DISK DRIVE DEVICE
| European Patent Office | 2016
SUBSTRATE FOR THIN FILM MAGNETIC HEAD, MAGNETIC HEAD SLIDER, AND HARD DISK DRIVE DEVICE
| European Patent Office | 2016
SUBSTRATE FOR THIN FILM MAGNETIC HEAD, MAGNETIC HEAD SLIDER, AND HARD DISK DRIVE DEVICE
| European Patent Office | 2016