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METHOD FOR PRODUCING SINTERED BOARD OF SILICON NITRIDE-BASED CERAMIC
PROBLEM TO BE SOLVED: To provide an improved method for producing the sintered board of silicon nitride-based ceramics by which deformation and weight loss are inhibited even when performing a calcination process under the nitrogen atmosphere at normal or low pressure.SOLUTION: A method for producing a sintered board of silicon nitride-based ceramics includes: a defatting process of defatting the molded body prepared by molding the raw material powders being the mixture of powders of silicon nitride and a sintering aid; a first housing process of housing the laminated defatting bodies W2 in the housing chamber of a housing vessel 7 in which the outdoor air is circulatable; a second housing process of housing the housing vessel 7 in the housing part 2d of the calcining vessel 2 having a ventilation path in which the outdoor air is circulatable; and a calcining process of placing the calcining vessel 2 in a heating furnace after the second housing process and calcining the defatting body in a nitrogen atmosphere. The calcination vessel 2 has the housing vessels 7 stacked in the housing part 2d in three or more stages. The method also includes a plugging powder arrangement process of arranging in the calcination vessel 2, the plugging powders T1 prepared by blending silicon nitride powders and sintering aid powders.SELECTED DRAWING: Figure 4
【課題】焼成工程が常圧または低圧の窒素雰囲気下で行う場合であっても、変形および重量損失の抑制される改善された窒化珪素質セラミックス焼結基板の製造方法の提供。【解決手段】窒化珪素粉末と焼結助剤粉末とを混合した原料粉を成形した成形体を脱脂し脱脂体を形成する脱脂工程と、脱脂工程後に、外気が流通可能な収納容器７の収納室に積層された脱脂体Ｗ２を収納する第１の収納工程と、外気が流通可能な通気路を有する焼成容器２の収納部２ｄに、収納容器７を収納する第２の収納工程と、第２の収納工程の後に、焼成容器２を加熱炉中に置き、窒素雰囲気中で脱脂体を焼成する焼成工程を有し、前記焼成容器２は、その収納部２ｄに３段以上積み重ねて収納された収納容器２を有し、前記焼成容器内２に、窒化珪素粉末および焼結助剤粉末を混合した詰め粉Ｔ１を配置する詰め粉配置工程を含む。【選択図】図４
METHOD FOR PRODUCING SINTERED BOARD OF SILICON NITRIDE-BASED CERAMIC
PROBLEM TO BE SOLVED: To provide an improved method for producing the sintered board of silicon nitride-based ceramics by which deformation and weight loss are inhibited even when performing a calcination process under the nitrogen atmosphere at normal or low pressure.SOLUTION: A method for producing a sintered board of silicon nitride-based ceramics includes: a defatting process of defatting the molded body prepared by molding the raw material powders being the mixture of powders of silicon nitride and a sintering aid; a first housing process of housing the laminated defatting bodies W2 in the housing chamber of a housing vessel 7 in which the outdoor air is circulatable; a second housing process of housing the housing vessel 7 in the housing part 2d of the calcining vessel 2 having a ventilation path in which the outdoor air is circulatable; and a calcining process of placing the calcining vessel 2 in a heating furnace after the second housing process and calcining the defatting body in a nitrogen atmosphere. The calcination vessel 2 has the housing vessels 7 stacked in the housing part 2d in three or more stages. The method also includes a plugging powder arrangement process of arranging in the calcination vessel 2, the plugging powders T1 prepared by blending silicon nitride powders and sintering aid powders.SELECTED DRAWING: Figure 4
【課題】焼成工程が常圧または低圧の窒素雰囲気下で行う場合であっても、変形および重量損失の抑制される改善された窒化珪素質セラミックス焼結基板の製造方法の提供。【解決手段】窒化珪素粉末と焼結助剤粉末とを混合した原料粉を成形した成形体を脱脂し脱脂体を形成する脱脂工程と、脱脂工程後に、外気が流通可能な収納容器７の収納室に積層された脱脂体Ｗ２を収納する第１の収納工程と、外気が流通可能な通気路を有する焼成容器２の収納部２ｄに、収納容器７を収納する第２の収納工程と、第２の収納工程の後に、焼成容器２を加熱炉中に置き、窒素雰囲気中で脱脂体を焼成する焼成工程を有し、前記焼成容器２は、その収納部２ｄに３段以上積み重ねて収納された収納容器２を有し、前記焼成容器内２に、窒化珪素粉末および焼結助剤粉末を混合した詰め粉Ｔ１を配置する詰め粉配置工程を含む。【選択図】図４
METHOD FOR PRODUCING SINTERED BOARD OF SILICON NITRIDE-BASED CERAMIC
窒化珪素質セラミックス焼結基板の製造方法
RI TOKUZEN (author) / KAGA YOICHIRO (author) / WATANABE JUNICHI (author)
2016-03-24
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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