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ELECTROLYTIC APPARATUS OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, PRODUCTION METHOD OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, AND PRODUCTION METHOD OF SPUTTERING TARGET
PROBLEM TO BE SOLVED: To provide an electrolytic apparatus of indium hydroxide powder or tin hydroxide powder, with which the indium hydroxide powder or the tin hydroxide powder having excellent uniformity of particle diameters and narrow width of particle size distribution is produced.SOLUTION: An electrolytic apparatus 1, with which indium or tin is electrolyzed and indium hydroxide powder or tin hydroxide powder is produced, has an electrolytic tank 10 with a plurality of electrodes installed therein, an adjustment tank 20 for adjusting an electrolytic solution 11, and a circulation means 30 connected with the electrolytic tank 10 and the adjustment tank 20, having a plurality of nozzles 33 to supply the electrolytic solution 11 into the electrolytic tank 10 installed in the vicinity of a tank wall 17b of the electrolytic tank 10 on the side opposite to the adjustment tank 20, and circulating the electrolytic solution 11, in which the electrolytic solution 11 is made to jet from the nozzles 33 to the side of the adjustment tank 20 by the circulation means 30 in parallel to the electrodes.SELECTED DRAWING: Figure 1
【課題】粒径の均一性に優れ、粒度分布の幅が狭い水酸化インジウム粉又は水酸化スズ粉を生成することが可能な水酸化インジウム粉又は水酸化スズ粉の電解装置を提供する。【解決手段】インジウム又はスズを電解して水酸化インジウム粉又は水酸化スズ粉を生成する電解装置１が、複数の電極が設けられた電解槽１０と、電解液１１を調整する調整槽２０と、電解槽１０及び調整槽２０に接続され、電解槽１０内に電解液１１を供給する複数のノズル３３が電解槽１０の調整槽２０と反対側の槽壁１７ｂ付近に設けられ、電解液１１を循環させる循環手段３０とを有し、循環手段３０により、ノズル３３から調整槽２０側に向って電極と平行に電解液１１を噴流させる。【選択図】図１
ELECTROLYTIC APPARATUS OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, PRODUCTION METHOD OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, AND PRODUCTION METHOD OF SPUTTERING TARGET
PROBLEM TO BE SOLVED: To provide an electrolytic apparatus of indium hydroxide powder or tin hydroxide powder, with which the indium hydroxide powder or the tin hydroxide powder having excellent uniformity of particle diameters and narrow width of particle size distribution is produced.SOLUTION: An electrolytic apparatus 1, with which indium or tin is electrolyzed and indium hydroxide powder or tin hydroxide powder is produced, has an electrolytic tank 10 with a plurality of electrodes installed therein, an adjustment tank 20 for adjusting an electrolytic solution 11, and a circulation means 30 connected with the electrolytic tank 10 and the adjustment tank 20, having a plurality of nozzles 33 to supply the electrolytic solution 11 into the electrolytic tank 10 installed in the vicinity of a tank wall 17b of the electrolytic tank 10 on the side opposite to the adjustment tank 20, and circulating the electrolytic solution 11, in which the electrolytic solution 11 is made to jet from the nozzles 33 to the side of the adjustment tank 20 by the circulation means 30 in parallel to the electrodes.SELECTED DRAWING: Figure 1
【課題】粒径の均一性に優れ、粒度分布の幅が狭い水酸化インジウム粉又は水酸化スズ粉を生成することが可能な水酸化インジウム粉又は水酸化スズ粉の電解装置を提供する。【解決手段】インジウム又はスズを電解して水酸化インジウム粉又は水酸化スズ粉を生成する電解装置１が、複数の電極が設けられた電解槽１０と、電解液１１を調整する調整槽２０と、電解槽１０及び調整槽２０に接続され、電解槽１０内に電解液１１を供給する複数のノズル３３が電解槽１０の調整槽２０と反対側の槽壁１７ｂ付近に設けられ、電解液１１を循環させる循環手段３０とを有し、循環手段３０により、ノズル３３から調整槽２０側に向って電極と平行に電解液１１を噴流させる。【選択図】図１
ELECTROLYTIC APPARATUS OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, PRODUCTION METHOD OF INDIUM HYDROXIDE POWDER OR TIN HYDROXIDE POWDER, AND PRODUCTION METHOD OF SPUTTERING TARGET
水酸化インジウム粉又は水酸化スズ粉の電解装置、水酸化インジウム粉又は水酸化スズ粉の製造方法、及びスパッタリングターゲットの製造方法
MORIMOTO TOSHIO (author) / KAMO TETSUO (author) / SUGAMOTO NORIAKI (author)
2016-04-11
Patent
Electronic Resource
Japanese
IPC:
C25B
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON- METALS
,
Elektrolytische oder elektrophoretische Verfahren für die Herstellung von Verbindungen oder von nichtmetallischen Elementen
/
C01G
Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle
,
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
/
C04B
Kalk
,
LIME
European Patent Office | 2020
| European Patent Office | 2016