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A platform for research: civil engineering, architecture and urbanism
HEAT RESISTANT GRAPHITE MEMBER AND MANUFACTURING METHOD THEREFOR
PROBLEM TO BE SOLVED: To provide a heat resistant graphite member excellent in heat resistance and durability.SOLUTION: The heat resistant graphite member has a graphite substrate composed of an isotropic graphite and a carbide film composed of carbide and coating a surface of the graphite substrate. The carbide member is a tantalum carbide film containing 90 atom% or more of TaC based on 100 atom% of whole film. The graphite substrate has a thermal expansion coefficient (CTE) of 5.8 to 6.4(×10/K) and a bulk density of 1.83 to 2.0(g/cm). As such by using the graphite substrate having bulk density and CTE in specific ranges, the heat resistant graphite member can be obtained which has largely enhanced heat resistance and durability without generating crack or detachment on the TaC film even exposed to severe environment. By using the heat resistant graphite member, single crystal ingot such as SiC, AlN and GaN can be manufactured at low cost.SELECTED DRAWING: Figure 4
【課題】耐熱性および耐久性に優れた耐熱黒鉛部材を提供する。【解決手段】本発明の耐熱黒鉛部材は、等方性黒鉛からなる黒鉛基材と、黒鉛基材の表面を被覆する炭化物からなる炭化物膜とを有する。この炭化物膜は、膜全体を１００原子％としてＴａＣが９０原子％以上を占める炭化タンタル膜である。黒鉛基材は、熱膨張係数（ＣＴＥ）が５．８〜６．４（×１０-６／Ｋ）であると共に嵩密度が１．８３〜２．０（ｇ／ｃｍ３）である。このように、嵩密度およびＣＴＥが特定範囲内にある黒鉛基材を用いることにより、過酷な環境下に曝されてもＴａＣ膜にクラックや剥離等が生じることがなく、耐熱性および耐久性が大幅に向上した耐熱黒鉛部材を得ることができる。本発明の耐熱黒鉛部材を用いると、ＳｉＣ、ＡｌＮ、ＧａＮ等の単結晶インゴットを低コストで製造することが可能となる。【選択図】図４
HEAT RESISTANT GRAPHITE MEMBER AND MANUFACTURING METHOD THEREFOR
PROBLEM TO BE SOLVED: To provide a heat resistant graphite member excellent in heat resistance and durability.SOLUTION: The heat resistant graphite member has a graphite substrate composed of an isotropic graphite and a carbide film composed of carbide and coating a surface of the graphite substrate. The carbide member is a tantalum carbide film containing 90 atom% or more of TaC based on 100 atom% of whole film. The graphite substrate has a thermal expansion coefficient (CTE) of 5.8 to 6.4(×10/K) and a bulk density of 1.83 to 2.0(g/cm). As such by using the graphite substrate having bulk density and CTE in specific ranges, the heat resistant graphite member can be obtained which has largely enhanced heat resistance and durability without generating crack or detachment on the TaC film even exposed to severe environment. By using the heat resistant graphite member, single crystal ingot such as SiC, AlN and GaN can be manufactured at low cost.SELECTED DRAWING: Figure 4
【課題】耐熱性および耐久性に優れた耐熱黒鉛部材を提供する。【解決手段】本発明の耐熱黒鉛部材は、等方性黒鉛からなる黒鉛基材と、黒鉛基材の表面を被覆する炭化物からなる炭化物膜とを有する。この炭化物膜は、膜全体を１００原子％としてＴａＣが９０原子％以上を占める炭化タンタル膜である。黒鉛基材は、熱膨張係数（ＣＴＥ）が５．８〜６．４（×１０-６／Ｋ）であると共に嵩密度が１．８３〜２．０（ｇ／ｃｍ３）である。このように、嵩密度およびＣＴＥが特定範囲内にある黒鉛基材を用いることにより、過酷な環境下に曝されてもＴａＣ膜にクラックや剥離等が生じることがなく、耐熱性および耐久性が大幅に向上した耐熱黒鉛部材を得ることができる。本発明の耐熱黒鉛部材を用いると、ＳｉＣ、ＡｌＮ、ＧａＮ等の単結晶インゴットを低コストで製造することが可能となる。【選択図】図４
HEAT RESISTANT GRAPHITE MEMBER AND MANUFACTURING METHOD THEREFOR
耐熱黒鉛部材およびその製造方法
SHIGEFUJI KEISUKE (author) / NAKAMURA DAISUKE (author)
2017-04-20
Patent
Electronic Resource
Japanese
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