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HIGH HEAT RESISTANT MEMBER AND MANUFACTURING METHOD THEREOF
PROBLEM TO BE SOLVED: To provide a high heat resistant member exhibiting excellent durability and contamination resistance even in an extremely high temperature and harsh atmosphere.SOLUTION: The high heat resistant member of the present invention comprises an isotropic graphite substrate and a tantalum carbide coating (TaC film) covering the surface thereof. The concentration of iron contained in the TaC film is 20 to 1000 mass ppm. When the iron concentration is within the range, the high heat resistant member shows remarkably high durability and can substantially prevent contamination of an object to be treated with iron. The TaC film composed of a non-oriented grain structure is further preferable. The high heat resistant member of the present invention can be produced by, for example, a sintering step of applying a slurry with TaC particles to a surface of the isotropic graphite substrate and then sintering the TaC particles, and a subsequent purification step of heating further in a high temperature or reduced pressure atmosphere.SELECTED DRAWING: Figure 1A
【課題】超高温で過酷な雰囲気中でも、非常に優れた耐久性や汚染性を示す高耐熱部材を提供する。【解決手段】本発明の高耐熱部材は、等方性黒鉛基材とその表面を被覆する炭化タンタル被膜(TaC膜)とからなる。そのTaC膜に含まれる鉄濃度は20〜1000mass ppmである。鉄濃度がその範囲内にある場合、高耐熱部材は顕著に高い耐久性を示し、また被処理物を実質的に鉄汚染することもない。TaC膜は、無配向粒状組織からなるとより好ましい。本発明の高耐熱部材は、例えば、TaC粒子を含むスラリーを等方性黒鉛基材の表面に塗布した後にTaC粒子を焼結させる焼結工程と、これに続いて高温または減圧した雰囲気中でさらに加熱する純化工程とを行うことにより得られる。【選択図】図1A
HIGH HEAT RESISTANT MEMBER AND MANUFACTURING METHOD THEREOF
PROBLEM TO BE SOLVED: To provide a high heat resistant member exhibiting excellent durability and contamination resistance even in an extremely high temperature and harsh atmosphere.SOLUTION: The high heat resistant member of the present invention comprises an isotropic graphite substrate and a tantalum carbide coating (TaC film) covering the surface thereof. The concentration of iron contained in the TaC film is 20 to 1000 mass ppm. When the iron concentration is within the range, the high heat resistant member shows remarkably high durability and can substantially prevent contamination of an object to be treated with iron. The TaC film composed of a non-oriented grain structure is further preferable. The high heat resistant member of the present invention can be produced by, for example, a sintering step of applying a slurry with TaC particles to a surface of the isotropic graphite substrate and then sintering the TaC particles, and a subsequent purification step of heating further in a high temperature or reduced pressure atmosphere.SELECTED DRAWING: Figure 1A
【課題】超高温で過酷な雰囲気中でも、非常に優れた耐久性や汚染性を示す高耐熱部材を提供する。【解決手段】本発明の高耐熱部材は、等方性黒鉛基材とその表面を被覆する炭化タンタル被膜(TaC膜)とからなる。そのTaC膜に含まれる鉄濃度は20〜1000mass ppmである。鉄濃度がその範囲内にある場合、高耐熱部材は顕著に高い耐久性を示し、また被処理物を実質的に鉄汚染することもない。TaC膜は、無配向粒状組織からなるとより好ましい。本発明の高耐熱部材は、例えば、TaC粒子を含むスラリーを等方性黒鉛基材の表面に塗布した後にTaC粒子を焼結させる焼結工程と、これに続いて高温または減圧した雰囲気中でさらに加熱する純化工程とを行うことにより得られる。【選択図】図1A
HIGH HEAT RESISTANT MEMBER AND MANUFACTURING METHOD THEREOF
高耐熱部材およびその製造方法
SHIGEFUJI KEISUKE (author) / NAKAMURA DAISUKE (author) / SUZUMURA AKITOSHI (author)
2018-09-20
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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