A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC/ALUMINUM JOINED BODY, SUBSTRATE FOR POWER MODULE, AND POWER MODULE
PROBLEM TO BE SOLVED: To provide a ceramic/aluminum joined body, where a ceramic member is bonded surly with an aluminum member, excellent in joint reliability at a cooling heating cycle load, and capable of preventing the ceramic member from cracking.SOLUTION: A Mg-containing oxide 36 having a spinel crystal structure is dispersed in a 2 μm range of an aluminum member 12 in a thickness direction from a joint boundary surface to a ceramic member 11. There is segregation part 31 in which Mg, Si, O are segregated in a region in the vicinity of the boundary surface to the ceramic member 11 in the aluminum member 12. The mass ratios of Mg, Si, O of the segregation part 31 to a position apart from the boundary surface 30 to an aluminum member 12 side by 10 μm are respectively in a predetermined range. The Mg amount in a position apart from the boundary surface 30 to the aluminum member 12 side by 10 μm is not greater than 0.8 mass%.SELECTED DRAWING: Figure 2
【課題】セラミックス部材とアルミニウム部材とが確実に接合され、冷熱サイクル負荷時の接合信頼性に優れるとともにセラミックス部材の割れの発生を抑制することができるセラミックス／アルミニウム接合体を提供する。【解決手段】アルミニウム部材１２のうちセラミックス部材１１との接合界面から厚さ方向に２μｍの範囲内に、スピネル結晶構造を有するＭｇ含有酸化物３６が分散しており、アルミニウム部材１２のうちセラミックス部材１１との接合界面近傍領域にＭｇ，Ｓｉ，Ｏが偏析した偏析部３１を有し、偏析部３１と接合界面３０からアルミニウム部材１２側に１０μｍ離間した位置とのＭｇ，Ｓｉ，Ｏの質量比が、それぞれ所定の範囲内とされ、接合界面３０からアルミニウム部材１２側に１０μｍ離間した位置におけるＭｇ量が０．８ｍａｓｓ％以下とされている。【選択図】図２
CERAMIC/ALUMINUM JOINED BODY, SUBSTRATE FOR POWER MODULE, AND POWER MODULE
PROBLEM TO BE SOLVED: To provide a ceramic/aluminum joined body, where a ceramic member is bonded surly with an aluminum member, excellent in joint reliability at a cooling heating cycle load, and capable of preventing the ceramic member from cracking.SOLUTION: A Mg-containing oxide 36 having a spinel crystal structure is dispersed in a 2 μm range of an aluminum member 12 in a thickness direction from a joint boundary surface to a ceramic member 11. There is segregation part 31 in which Mg, Si, O are segregated in a region in the vicinity of the boundary surface to the ceramic member 11 in the aluminum member 12. The mass ratios of Mg, Si, O of the segregation part 31 to a position apart from the boundary surface 30 to an aluminum member 12 side by 10 μm are respectively in a predetermined range. The Mg amount in a position apart from the boundary surface 30 to the aluminum member 12 side by 10 μm is not greater than 0.8 mass%.SELECTED DRAWING: Figure 2
【課題】セラミックス部材とアルミニウム部材とが確実に接合され、冷熱サイクル負荷時の接合信頼性に優れるとともにセラミックス部材の割れの発生を抑制することができるセラミックス／アルミニウム接合体を提供する。【解決手段】アルミニウム部材１２のうちセラミックス部材１１との接合界面から厚さ方向に２μｍの範囲内に、スピネル結晶構造を有するＭｇ含有酸化物３６が分散しており、アルミニウム部材１２のうちセラミックス部材１１との接合界面近傍領域にＭｇ，Ｓｉ，Ｏが偏析した偏析部３１を有し、偏析部３１と接合界面３０からアルミニウム部材１２側に１０μｍ離間した位置とのＭｇ，Ｓｉ，Ｏの質量比が、それぞれ所定の範囲内とされ、接合界面３０からアルミニウム部材１２側に１０μｍ離間した位置におけるＭｇ量が０．８ｍａｓｓ％以下とされている。【選択図】図２
CERAMIC/ALUMINUM JOINED BODY, SUBSTRATE FOR POWER MODULE, AND POWER MODULE
セラミックス／アルミニウム接合体、パワーモジュール用基板、及び、パワーモジュール
KUROMITSU YOSHIO (author) / AKIYAMA KAZUHIRO (author) / NAGASE TOSHIYUKI (author) / NAGATOMO YOSHIYUKI (author) / TERASAKI NOBUYUKI (author) / IKUHARA YUUICHI (author) / SHIBATA NAOYA (author) / KUMAMOTO AKIHITO (author)
2017-05-25
Patent
Electronic Resource
Japanese
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