A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
PROBLEM TO BE SOLVED: To provide plasma-resistant chamber material.SOLUTION: A solid sintered ceramic article includes a solid solution comprising YOat concentration of approximately 30 molar % to approximately 60 molar %, ErOat concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO, GdOor SiOat concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article includes a solid solution comprising 40-100 molar % of YO, 0-50 molar % of ZrO, and 0-40 molar % of AlO.SELECTED DRAWING: Figure 2
【課題】プラズマに耐性のあるチャンバ材料を提供する。【解決手段】固体焼結セラミックス物品は、約３０モル％〜約６０モル％の濃度のＹ２Ｏ３と、約２０モル％〜約６０モル％の濃度のＥｒ２Ｏ３と、約０モル％〜約３０モル％の濃度のＺｒＯ２、Ｇｄ２Ｏ３、又はＳｉＯ２のうちの少なくとも１つとを含む固溶体を含む。あるいはまた、固体焼結セラミックス物品は、４０〜１００モル％のＹ２Ｏ３と、０〜５０モル％のＺｒＯ２と、０〜４０モル％のＡｌ２Ｏ３とを含む固溶体を含む。【選択図】図２
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
PROBLEM TO BE SOLVED: To provide plasma-resistant chamber material.SOLUTION: A solid sintered ceramic article includes a solid solution comprising YOat concentration of approximately 30 molar % to approximately 60 molar %, ErOat concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO, GdOor SiOat concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article includes a solid solution comprising 40-100 molar % of YO, 0-50 molar % of ZrO, and 0-40 molar % of AlO.SELECTED DRAWING: Figure 2
【課題】プラズマに耐性のあるチャンバ材料を提供する。【解決手段】固体焼結セラミックス物品は、約３０モル％〜約６０モル％の濃度のＹ２Ｏ３と、約２０モル％〜約６０モル％の濃度のＥｒ２Ｏ３と、約０モル％〜約３０モル％の濃度のＺｒＯ２、Ｇｄ２Ｏ３、又はＳｉＯ２のうちの少なくとも１つとを含む固溶体を含む。あるいはまた、固体焼結セラミックス物品は、４０〜１００モル％のＹ２Ｏ３と、０〜５０モル％のＺｒＯ２と、０〜４０モル％のＡｌ２Ｏ３とを含む固溶体を含む。【選択図】図２
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
希土類酸化物系モノリシックチャンバ材料
JENNIFER Y SUN (author) / BIRAJA P KANUNGO (author)
2017-08-17
Patent
Electronic Resource
Japanese