A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
A solid sintered ceramic article may include Y2O3 at a concentration of approximately 40 molar % to approximately 60 molar % and Er2O3 at a concentration of approximately 400 molar % to approximately 60 molar %. An article may include a body and a plasma resistant ceramic coating on at least one surface of the body. The plasma resistant ceramic coating comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
A solid sintered ceramic article may include Y2O3 at a concentration of approximately 40 molar % to approximately 60 molar % and Er2O3 at a concentration of approximately 400 molar % to approximately 60 molar %. An article may include a body and a plasma resistant ceramic coating on at least one surface of the body. The plasma resistant ceramic coating comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL
SUN JENNIFER Y (author) / KANUNGO BIRAJA P (author)
2016-11-03
Patent
Electronic Resource
English