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NIOBIC ACID LEAD ZIRCONATE TITANATE FILM LAMINATE, ELEMENT USING NIOBIC ACID LEAD ZIRCONATE TITANATE FILM LAMINATE, AND MANUFACTURING METHOD THEREOF
PROBLEM TO BE SOLVED: To provide a niobic acid lead zirconate titanate film laminate having high orientation of (100) orientation or (001) orientation by controlling crystal orientation, and to provide an element using the niobic acid lead zirconate titanate film laminate, and a manufacturing method thereof.SOLUTION: A niobic acid lead zirconate titanate film laminate includes a lead zirconate titanate film where the peak ratio in the (100) direction or (001) direction for all peaks detected by X-ray diffractometry is 60% or more, and a niobic acid lead zirconate titanate film placed in contact with the lead zirconate titanate film, where the peak ratio in the (100) direction or (001) direction for all peaks detected by the X-ray diffractometry, according to the orientation direction of the lead zirconate titanate film, is 60% or more, and molar concentration of niobium is 10 mol% or more for the total value of mol numbers of titanium and zirconium.SELECTED DRAWING: Figure 1
【課題】結晶配向を制御し、（１００）配向又は（００１）配向の配向度が高いニオブ酸チタン酸ジルコン酸鉛膜積層体、そのニオブ酸チタン酸ジルコン酸鉛膜積層体を用いた素子及びその製造方法を提供する。【解決手段】本発明に係るニオブ酸チタン酸ジルコン酸鉛膜積層体は、Ｘ線回折法により検出される全ピークに対する（１００）方向又は（００１）方向のピーク比が６０％以上であるチタン酸ジルコン酸鉛膜と、前記チタン酸ジルコン酸鉛膜に接して配置され、前記チタン酸ジルコン酸鉛膜の配向方向に応じて、前記Ｘ線回折法により検出される全ピークに対する前記（１００）方向又は前記（００１）方向のピーク比が６０％以上であり、ニオブのモル濃度がチタンとジルコニウムとのモル数の合計値に対して１０ ｍｏｌ％以上であるニオブ酸チタン酸ジルコン酸鉛膜と、を備える。【選択図】図１
NIOBIC ACID LEAD ZIRCONATE TITANATE FILM LAMINATE, ELEMENT USING NIOBIC ACID LEAD ZIRCONATE TITANATE FILM LAMINATE, AND MANUFACTURING METHOD THEREOF
PROBLEM TO BE SOLVED: To provide a niobic acid lead zirconate titanate film laminate having high orientation of (100) orientation or (001) orientation by controlling crystal orientation, and to provide an element using the niobic acid lead zirconate titanate film laminate, and a manufacturing method thereof.SOLUTION: A niobic acid lead zirconate titanate film laminate includes a lead zirconate titanate film where the peak ratio in the (100) direction or (001) direction for all peaks detected by X-ray diffractometry is 60% or more, and a niobic acid lead zirconate titanate film placed in contact with the lead zirconate titanate film, where the peak ratio in the (100) direction or (001) direction for all peaks detected by the X-ray diffractometry, according to the orientation direction of the lead zirconate titanate film, is 60% or more, and molar concentration of niobium is 10 mol% or more for the total value of mol numbers of titanium and zirconium.SELECTED DRAWING: Figure 1
【課題】結晶配向を制御し、（１００）配向又は（００１）配向の配向度が高いニオブ酸チタン酸ジルコン酸鉛膜積層体、そのニオブ酸チタン酸ジルコン酸鉛膜積層体を用いた素子及びその製造方法を提供する。【解決手段】本発明に係るニオブ酸チタン酸ジルコン酸鉛膜積層体は、Ｘ線回折法により検出される全ピークに対する（１００）方向又は（００１）方向のピーク比が６０％以上であるチタン酸ジルコン酸鉛膜と、前記チタン酸ジルコン酸鉛膜に接して配置され、前記チタン酸ジルコン酸鉛膜の配向方向に応じて、前記Ｘ線回折法により検出される全ピークに対する前記（１００）方向又は前記（００１）方向のピーク比が６０％以上であり、ニオブのモル濃度がチタンとジルコニウムとのモル数の合計値に対して１０ ｍｏｌ％以上であるニオブ酸チタン酸ジルコン酸鉛膜と、を備える。【選択図】図１
NIOBIC ACID LEAD ZIRCONATE TITANATE FILM LAMINATE, ELEMENT USING NIOBIC ACID LEAD ZIRCONATE TITANATE FILM LAMINATE, AND MANUFACTURING METHOD THEREOF
ニオブ酸チタン酸ジルコン酸鉛膜積層体、ニオブ酸チタン酸ジルコン酸鉛膜積層体を用いた素子及びその製造方法
KOBAYASHI TAKESHI (author) / MORIWAKI MASAHITO (author)
2017-09-28
Patent
Electronic Resource
Japanese
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