A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
BARIUM SILICIDE BULK POLYCRYSTALLINE BODY AND APPLICATION THEREOF
PROBLEM TO BE SOLVED: To provide a barium silicide bulk polycrystalline body suitable as a sputtering target or a thermoelectric transducer.SOLUTION: The barium silicide bulk polycrystalline body containing at least one kind of group 3 elements and group 5 elements is produced by a hot-press step of subjecting a powder of barium silicide alloy including at least one kind of group 3 elements and group 5 elements to hot press treatment at 600 to 1,100°C. The group 3 element or the group 5 element is at least one kind of Sc, Y, V, Nb and Ta and the total content thereof is preferably 0.0001 to 30 atm%. Additionally, the barium silicide bulk polycrystalline body preferably has an oxygen content of 20 atm% or less, has a crystal phase of a BaSiorthorhombic crystal and has a density of 3.0 g/cmor more.SELECTED DRAWING: None
【課題】スパッタリングターゲット又は熱電変換素子として好適な珪化バリウムバルク多結晶体の提供。【解決手段】３族又は５族元素の少なくとも１種を含む珪化バリウム合金の粉末を６００〜１１００℃でホットプレス処理するホットプレス工程により製造される、３族又は５族元素の少なくとも１種を含有する珪化バリウムバルク多結晶体。３族又は５族元素がＳｃ，Ｙ、Ｖ、Ｎｂ又はＴａの少なくとも１種であり、総含有量が０．０００１〜３０ａｔｍ％であることが好ましい、珪化バリウムバルク多結晶体。更に、含有酸素量が２０ａｔｍ％以下であり、ＢａＳｉ２斜方晶の結晶相を有し、密度が３．０ｇ／ｃｍ３以上であることが、好ましい珪化バリウムバルク多結晶体。【選択図】なし
BARIUM SILICIDE BULK POLYCRYSTALLINE BODY AND APPLICATION THEREOF
PROBLEM TO BE SOLVED: To provide a barium silicide bulk polycrystalline body suitable as a sputtering target or a thermoelectric transducer.SOLUTION: The barium silicide bulk polycrystalline body containing at least one kind of group 3 elements and group 5 elements is produced by a hot-press step of subjecting a powder of barium silicide alloy including at least one kind of group 3 elements and group 5 elements to hot press treatment at 600 to 1,100°C. The group 3 element or the group 5 element is at least one kind of Sc, Y, V, Nb and Ta and the total content thereof is preferably 0.0001 to 30 atm%. Additionally, the barium silicide bulk polycrystalline body preferably has an oxygen content of 20 atm% or less, has a crystal phase of a BaSiorthorhombic crystal and has a density of 3.0 g/cmor more.SELECTED DRAWING: None
【課題】スパッタリングターゲット又は熱電変換素子として好適な珪化バリウムバルク多結晶体の提供。【解決手段】３族又は５族元素の少なくとも１種を含む珪化バリウム合金の粉末を６００〜１１００℃でホットプレス処理するホットプレス工程により製造される、３族又は５族元素の少なくとも１種を含有する珪化バリウムバルク多結晶体。３族又は５族元素がＳｃ，Ｙ、Ｖ、Ｎｂ又はＴａの少なくとも１種であり、総含有量が０．０００１〜３０ａｔｍ％であることが好ましい、珪化バリウムバルク多結晶体。更に、含有酸素量が２０ａｔｍ％以下であり、ＢａＳｉ２斜方晶の結晶相を有し、密度が３．０ｇ／ｃｍ３以上であることが、好ましい珪化バリウムバルク多結晶体。【選択図】なし
BARIUM SILICIDE BULK POLYCRYSTALLINE BODY AND APPLICATION THEREOF
珪化バリウムバルク多結晶体及びその用途
MESHIDA MASAMI (author) / KURAMOCHI TOSHIHITO (author)
2017-10-05
Patent
Electronic Resource
Japanese
| European Patent Office | 2015