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BARIUM-SILICIDE-BASED BULK BODY, BARIUM-SILICIDE-BASED SPUTTERING TARGET, AND METHOD FOR MANUFACTURING BARIUM-SILICIDE-BASED CRYSTALLINE FILM USING THE SAME
PROBLEM TO BE SOLVED: To provide a barium-silicide-based bulk polycrystalline body, a barium-silicide-based film, and an application for the same.SOLUTION: A barium-silicide-based bulk polycrystalline body is characterized in that [M]/([Ba]+[Si]+[M]) is 0.01-20 atm% and the oxygen content is 20 atm% or less, where [Ba], [Si], and [M] respectively represent the amount of barium, silicon, and a metal element M (at least one element selected from the group consisting of strontium, calcium, and magnesium).
【課題】 珪化バリウム系バルク多結晶体、珪化バリウム系膜及びその用途を提供する。【解決手段】 バリウム、ケイ素及び金属元素Ｍ（ストロンチウム、カルシウム及びマグネシウムからなる群から選択される少なくとも１種）の含有量を、それぞれ［Ｂａ］、［Ｓｉ］及び［Ｍ］としたときに、［Ｍ］／（［Ｂａ］＋［Ｓｉ］＋［Ｍ］）が０．０１〜２０ａｔｍ％であり、酸素含有量が２０ａｔｍ％以下であることを特徴とする珪化バリウム系バルク多結晶体。【選択図】なし
BARIUM-SILICIDE-BASED BULK BODY, BARIUM-SILICIDE-BASED SPUTTERING TARGET, AND METHOD FOR MANUFACTURING BARIUM-SILICIDE-BASED CRYSTALLINE FILM USING THE SAME
PROBLEM TO BE SOLVED: To provide a barium-silicide-based bulk polycrystalline body, a barium-silicide-based film, and an application for the same.SOLUTION: A barium-silicide-based bulk polycrystalline body is characterized in that [M]/([Ba]+[Si]+[M]) is 0.01-20 atm% and the oxygen content is 20 atm% or less, where [Ba], [Si], and [M] respectively represent the amount of barium, silicon, and a metal element M (at least one element selected from the group consisting of strontium, calcium, and magnesium).
【課題】 珪化バリウム系バルク多結晶体、珪化バリウム系膜及びその用途を提供する。【解決手段】 バリウム、ケイ素及び金属元素Ｍ（ストロンチウム、カルシウム及びマグネシウムからなる群から選択される少なくとも１種）の含有量を、それぞれ［Ｂａ］、［Ｓｉ］及び［Ｍ］としたときに、［Ｍ］／（［Ｂａ］＋［Ｓｉ］＋［Ｍ］）が０．０１〜２０ａｔｍ％であり、酸素含有量が２０ａｔｍ％以下であることを特徴とする珪化バリウム系バルク多結晶体。【選択図】なし
BARIUM-SILICIDE-BASED BULK BODY, BARIUM-SILICIDE-BASED SPUTTERING TARGET, AND METHOD FOR MANUFACTURING BARIUM-SILICIDE-BASED CRYSTALLINE FILM USING THE SAME
珪化バリウム系バルク体、珪化バリウム系スパッタリングターゲット及びそれを用いた珪化バリウム系結晶膜の製造方法
MESHIDA MASAMI (author) / KURAMOCHI TOSHIHITO (author)
2015-12-10
Patent
Electronic Resource
Japanese
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