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PROBLEM TO BE SOLVED: To provide a part for wedge bonding, which is less in occurrence of particle release, and high in durability.SOLUTION: A part for wedge bonding is proposed, in which at least a portion put in touch with a wire is composed of a ceramic sintered compact including an aluminum oxide as a primary component and a titanium compound as a subcomponent, provided that the titanium compound is selected from at least a titanium nitride, a titanium carbonitride, and a titanium boride. It is preferred that the ceramic sintered compact is 15-40 mass% in the content of the titanium compound. Also, it is preferred that the ceramic sintered compact includes ytterbium of which the content is 0.06-0.2 mass% in terms of oxide.SELECTED DRAWING: Figure 1
【課題】脱粒の発生が少なく、耐久性が高いウエッジボンディング用部品を提供する。【解決手段】少なくともワイヤと接触する部分が、酸化アルミニウムを主成分とし、チタンの窒化物、炭窒化物および硼化物の少なくともいずれかから選ばれるチタン化合物を副成分として含むセラミック焼結体からなるウエッジボンディング用部品を提案する。セラミック焼結体は、前記チタン化合物の含有量が15質量%以上40質量%以下であることが好ましい。また、さらにイッテルビウムを含み、その含有量が酸化物換算で0.06質量%以上0.2質量%以下であることが好ましい。【選択図】 図1
PROBLEM TO BE SOLVED: To provide a part for wedge bonding, which is less in occurrence of particle release, and high in durability.SOLUTION: A part for wedge bonding is proposed, in which at least a portion put in touch with a wire is composed of a ceramic sintered compact including an aluminum oxide as a primary component and a titanium compound as a subcomponent, provided that the titanium compound is selected from at least a titanium nitride, a titanium carbonitride, and a titanium boride. It is preferred that the ceramic sintered compact is 15-40 mass% in the content of the titanium compound. Also, it is preferred that the ceramic sintered compact includes ytterbium of which the content is 0.06-0.2 mass% in terms of oxide.SELECTED DRAWING: Figure 1
【課題】脱粒の発生が少なく、耐久性が高いウエッジボンディング用部品を提供する。【解決手段】少なくともワイヤと接触する部分が、酸化アルミニウムを主成分とし、チタンの窒化物、炭窒化物および硼化物の少なくともいずれかから選ばれるチタン化合物を副成分として含むセラミック焼結体からなるウエッジボンディング用部品を提案する。セラミック焼結体は、前記チタン化合物の含有量が15質量%以上40質量%以下であることが好ましい。また、さらにイッテルビウムを含み、その含有量が酸化物換算で0.06質量%以上0.2質量%以下であることが好ましい。【選択図】 図1
PART FOR WEDGE BONDING
ウエッジボンディング用部品
SHIGEYOSHI HIDEKAZU (author)
2017-11-30
Patent
Electronic Resource
Japanese
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