A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
OXIDE SINTERED BODY
PROBLEM TO BE SOLVED: To provide an oxide sintered body that has a high relative density and enables a high-performance TFT to be produced.SOLUTION: The oxide sintered body includes indium, aluminum, and tin. In the oxide sintered body, peak tops are observed at 14° to 15°, 28° to 30°, 33° to 35°, 53° to 55°, and 62° to 64° at 2θ/θ when peaks caused by a bixbyite-type crystal structure represented by InOare subtracted from all the peaks of a chart obtained by X-ray diffraction measurement.SELECTED DRAWING: None
【課題】高い相対密度を有し、高性能なＴＦＴを製造することができる酸化物焼結体を提供する。【解決手段】インジウム、アルミニウム、及びスズを含む酸化物焼結体であって、Ｘ線回折測定により得られるチャートの全ピークから、Ｉｎ２Ｏ３で表されるビックスバイト型結晶構造に起因するピークを除いた場合に、２θ／θにおいて、ピークトップが１４°〜１５°、２８°〜３０°、３３°〜３５°、５３°〜５５°、及び６２°〜６４°に観察される酸化物焼結体。【選択図】なし
OXIDE SINTERED BODY
PROBLEM TO BE SOLVED: To provide an oxide sintered body that has a high relative density and enables a high-performance TFT to be produced.SOLUTION: The oxide sintered body includes indium, aluminum, and tin. In the oxide sintered body, peak tops are observed at 14° to 15°, 28° to 30°, 33° to 35°, 53° to 55°, and 62° to 64° at 2θ/θ when peaks caused by a bixbyite-type crystal structure represented by InOare subtracted from all the peaks of a chart obtained by X-ray diffraction measurement.SELECTED DRAWING: None
【課題】高い相対密度を有し、高性能なＴＦＴを製造することができる酸化物焼結体を提供する。【解決手段】インジウム、アルミニウム、及びスズを含む酸化物焼結体であって、Ｘ線回折測定により得られるチャートの全ピークから、Ｉｎ２Ｏ３で表されるビックスバイト型結晶構造に起因するピークを除いた場合に、２θ／θにおいて、ピークトップが１４°〜１５°、２８°〜３０°、３３°〜３５°、５３°〜５５°、及び６２°〜６４°に観察される酸化物焼結体。【選択図】なし
OXIDE SINTERED BODY
酸化物焼結体
INOUE KAZUYOSHI (author) / UTSUNO FUTOSHI (author) / TOMAI SHIGEKAZU (author) / SHIBATA MASATOSHI (author) / ITOSE ASAMI (author) / TAKESHIMA MOTOHIRO (author)
2017-12-21
Patent
Electronic Resource
Japanese
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