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METHOD AND APPARATUS FOR FORMING CERAMIC PARTS IN HOT ISOSTATIC PRESS USING ULTRASONICS
PROBLEM TO BE SOLVED: To provide a method for forming ceramic parts used in a plasma processing device, from a ceramic powder.SOLUTION: A ceramic powder is placed in a press. The ceramic powder is pressurized with a pressure to cause consolidation of the ceramic powder. Ultrasonic energy is applied to the ceramic powder for at least a period of time during the applying pressure to the ceramic powder, forming the ceramic powder into a ceramic object. The applying pressure to the ceramic powder is ended.SELECTED DRAWING: Figure 1
【課題】セラミック粉末から、プラズマ処理装置で用いられるセラミック部品を形成するための方法の提供。【解決手段】セラミック粉末は、加圧機に設置され、セラミック粉末の固化を生じさせる圧力でセラミック粉末が加圧される。セラミック粉末への加圧中の少なくとも一定期間に超音波エネルギがセラミック粉末に印加されて、セラミック粉末をセラミック体に成形し、セラミック粉末への加圧が終了する。【選択図】図１
METHOD AND APPARATUS FOR FORMING CERAMIC PARTS IN HOT ISOSTATIC PRESS USING ULTRASONICS
PROBLEM TO BE SOLVED: To provide a method for forming ceramic parts used in a plasma processing device, from a ceramic powder.SOLUTION: A ceramic powder is placed in a press. The ceramic powder is pressurized with a pressure to cause consolidation of the ceramic powder. Ultrasonic energy is applied to the ceramic powder for at least a period of time during the applying pressure to the ceramic powder, forming the ceramic powder into a ceramic object. The applying pressure to the ceramic powder is ended.SELECTED DRAWING: Figure 1
【課題】セラミック粉末から、プラズマ処理装置で用いられるセラミック部品を形成するための方法の提供。【解決手段】セラミック粉末は、加圧機に設置され、セラミック粉末の固化を生じさせる圧力でセラミック粉末が加圧される。セラミック粉末への加圧中の少なくとも一定期間に超音波エネルギがセラミック粉末に印加されて、セラミック粉末をセラミック体に成形し、セラミック粉末への加圧が終了する。【選択図】図１
METHOD AND APPARATUS FOR FORMING CERAMIC PARTS IN HOT ISOSTATIC PRESS USING ULTRASONICS
超音波を用いる熱間等方圧加圧においてセラミック部品を形成するための方法および装置
WILLIAM CHARLES (author) / THOMAS STEVENSON (author) / NASH ANDERSON (author) / RUSSELL ORMOND (author) / MICHAEL LOPEZ (author)
2018-04-12
Patent
Electronic Resource
Japanese
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