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PIEZOELECTRIC MATERIAL, MANUFACTURING METHOD FOR PIEZOELECTRIC MATERIAL, PIEZOELECTRIC ELEMENT, VIBRATION WAVE MOTOR, OPTICAL EQUIPMENT, AND ELECTRONIC DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric material excellent in driving controllability of a piezoelectric device.SOLUTION: In a piezoelectric material, x, which represents a ratio of a content (mol) of Ca to A (mol) that represents a total content of Ba and Ca, falls within a range of 0.10≤x≤0.18; y, which represents a ratio of a content (mol) of Zr to B (mol) that represents a total content of Ti, Zr, and Mn, falls within a range of 0.055≤y≤0.085; and z, which represents a ratio of a content (mol) of Mn to the B (mol), falls within a range of 0.003≤z≤0.012. When drepresents a piezoelectric constant dmeasured by increasing a temperature of the piezoelectric material from -30°C to -20°C and drepresents a piezoelectric constant dmeasured by decreasing a temperature of the piezoelectric material from 25°C to -20°C, the piezoelectric material satisfies a relationship of 0≤(|d-d|)/|d|≤0.08, and has a value of 130 pm/V or more for each of |d| and |d|.SELECTED DRAWING: Figure 8
【課題】圧電デバイスの駆動制御性に優れる圧電材料を提供する。【解決手段】BaおよびCaの含有量の和であるA(mol)に対するCaの含有量(mol)の比であるxが0.10≦x≦0.18、Ti、ZrおよびMnの含有量の和であるB(mol)に対するZrの含有量(mol)の比であるyが0.055≦y≦0.085、前記B(mol)に対するMnの含有量(mol)の比であるzが0.003≦z≦0.012、前記圧電材料を−30℃から−20℃まで昇温して計測した圧電定数d31をd31(-20u)、前記圧電材料を25℃から−20℃まで降温して計測した圧電定数d31をd31(-20d)としたときに、0≦(|d31(-20u)−d31(-20d)|)/|d31(-20u)|≦0.08、かつ、|d31(-20u)|と|d31(-20d)|のいずれもが130pm/V以上である圧電材料。【選択図】図8
PIEZOELECTRIC MATERIAL, MANUFACTURING METHOD FOR PIEZOELECTRIC MATERIAL, PIEZOELECTRIC ELEMENT, VIBRATION WAVE MOTOR, OPTICAL EQUIPMENT, AND ELECTRONIC DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric material excellent in driving controllability of a piezoelectric device.SOLUTION: In a piezoelectric material, x, which represents a ratio of a content (mol) of Ca to A (mol) that represents a total content of Ba and Ca, falls within a range of 0.10≤x≤0.18; y, which represents a ratio of a content (mol) of Zr to B (mol) that represents a total content of Ti, Zr, and Mn, falls within a range of 0.055≤y≤0.085; and z, which represents a ratio of a content (mol) of Mn to the B (mol), falls within a range of 0.003≤z≤0.012. When drepresents a piezoelectric constant dmeasured by increasing a temperature of the piezoelectric material from -30°C to -20°C and drepresents a piezoelectric constant dmeasured by decreasing a temperature of the piezoelectric material from 25°C to -20°C, the piezoelectric material satisfies a relationship of 0≤(|d-d|)/|d|≤0.08, and has a value of 130 pm/V or more for each of |d| and |d|.SELECTED DRAWING: Figure 8
【課題】圧電デバイスの駆動制御性に優れる圧電材料を提供する。【解決手段】BaおよびCaの含有量の和であるA(mol)に対するCaの含有量(mol)の比であるxが0.10≦x≦0.18、Ti、ZrおよびMnの含有量の和であるB(mol)に対するZrの含有量(mol)の比であるyが0.055≦y≦0.085、前記B(mol)に対するMnの含有量(mol)の比であるzが0.003≦z≦0.012、前記圧電材料を−30℃から−20℃まで昇温して計測した圧電定数d31をd31(-20u)、前記圧電材料を25℃から−20℃まで降温して計測した圧電定数d31をd31(-20d)としたときに、0≦(|d31(-20u)−d31(-20d)|)/|d31(-20u)|≦0.08、かつ、|d31(-20u)|と|d31(-20d)|のいずれもが130pm/V以上である圧電材料。【選択図】図8
PIEZOELECTRIC MATERIAL, MANUFACTURING METHOD FOR PIEZOELECTRIC MATERIAL, PIEZOELECTRIC ELEMENT, VIBRATION WAVE MOTOR, OPTICAL EQUIPMENT, AND ELECTRONIC DEVICE
圧電材料、圧電材料の製造方法、圧電素子、振動波モータ、光学機器、および電子機器
SAITO HIROSHI (author) / KAMIBAYASHI AKIRA (author) / WATANABE TOMOHIRO (author) / NIINUMA YUTO (author) / SHIMIZU KOJI (author) / AKATSUKA TOSHIHIKO (author)
2018-08-23
Patent
Electronic Resource
Japanese
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