A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
OXYNITRIDE THIN FILM AND CAPACITIVE ELEMENT
PROBLEM TO BE SOLVED: To provide: a dielectric thin film which can achieve a high production efficiency, and which has superior dielectric characteristics and a main composition including an oxynitride; and a capacitive element including the dielectric thin film.SOLUTION: A dielectric thin film comprises a main composition consisting of an oxynitride represented by the composition formula, ABON(a+b+o+n=5), where A represents one or more of Sr, Ba, Ca, La, Ce, Pr, Nd and Na, and B represents one or more of Ta, Nb, Ti and W. Crystal grains that the dielectric thin film includes are composed of columnar grains of polycrystalline not oriented in a particular crystal plane direction.SELECTED DRAWING: Figure 1
【課題】 製造効率が高く、誘電特性に優れる酸窒化物から成る主組成を有する誘電体薄膜およびそれを含む容量素子を提供すること。【解決手段】 組成式ＡａＢｂＯｏＮｎ（ａ＋ｂ＋ｏ＋ｎ＝５）で表される酸窒化物から成る主組成を有する誘電体薄膜であって、前記ＡはＳｒ，Ｂａ，Ｃａ，Ｌａ，Ｃｅ，Ｐｒ，Ｎｄ，Ｎａのいずれか１つ以上であり、前記ＢはＴａ，Ｎｂ，Ｔｉ，Ｗのいずれか１つ以上であり、前記誘電体薄膜を構成する結晶粒子は、ある特定の結晶面方位に配向していない多結晶であり、しかも柱状の粒子で構成されることを特徴とする誘電体薄膜。【選択図】 図１
OXYNITRIDE THIN FILM AND CAPACITIVE ELEMENT
PROBLEM TO BE SOLVED: To provide: a dielectric thin film which can achieve a high production efficiency, and which has superior dielectric characteristics and a main composition including an oxynitride; and a capacitive element including the dielectric thin film.SOLUTION: A dielectric thin film comprises a main composition consisting of an oxynitride represented by the composition formula, ABON(a+b+o+n=5), where A represents one or more of Sr, Ba, Ca, La, Ce, Pr, Nd and Na, and B represents one or more of Ta, Nb, Ti and W. Crystal grains that the dielectric thin film includes are composed of columnar grains of polycrystalline not oriented in a particular crystal plane direction.SELECTED DRAWING: Figure 1
【課題】 製造効率が高く、誘電特性に優れる酸窒化物から成る主組成を有する誘電体薄膜およびそれを含む容量素子を提供すること。【解決手段】 組成式ＡａＢｂＯｏＮｎ（ａ＋ｂ＋ｏ＋ｎ＝５）で表される酸窒化物から成る主組成を有する誘電体薄膜であって、前記ＡはＳｒ，Ｂａ，Ｃａ，Ｌａ，Ｃｅ，Ｐｒ，Ｎｄ，Ｎａのいずれか１つ以上であり、前記ＢはＴａ，Ｎｂ，Ｔｉ，Ｗのいずれか１つ以上であり、前記誘電体薄膜を構成する結晶粒子は、ある特定の結晶面方位に配向していない多結晶であり、しかも柱状の粒子で構成されることを特徴とする誘電体薄膜。【選択図】 図１
OXYNITRIDE THIN FILM AND CAPACITIVE ELEMENT
酸窒化物薄膜および容量素子
SHIBAHARA TAKESHI (author) / NAGAMINE YUKI (author) / YAMAZAKI KUMIKO (author)
2018-11-08
Patent
Electronic Resource
Japanese