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THERMAL SPRAY MATERIAL, METHOD FOR MANUFACTURING THE SAME, THERMAL SPRAY COATING, METHOD FOR FORMING THE SAME, AND THERMAL SPRAY MEMBER
SOLUTION: The thermal spray coating containing rare earth (R), aluminum and oxygen and also containing a crystal phase of composite oxide including rare earth and aluminum, the crystal phase of composite oxide including rare earth and aluminum including a crystal phase of composite oxide having a composition whose rare earth is richer than the stoichiometric composition of rare earth-aluminum-monoclinic (R4Al2O9) having a part of Al atom sites of the rare earth-aluminum-monoclinic (R4Al2O9) replaced by rare earth (R) atoms.EFFECT: The high corrosion resistance thermal spray coating capable of reducing the amount of particles caused by a reaction with halogen based gas plasma and excellent in plasma etching resistance performance is excellent as a thermal spray coating formed on a component and a member, etc., in a plasma etching apparatus used in a semiconductor manufacturing process.SELECTED DRAWING: Figure 2
【解決手段】希土類（Ｒ）、アルミニウム及び酸素を含有し、希土類及びアルミニウムを含有する複合酸化物の結晶相を含む溶射皮膜であり、希土類及びアルミニウムを含有する複合酸化物の結晶相が、希土類・アルミニウム・モノクリニック（Ｒ4Ａｌ2Ｏ9）のＡｌ原子のサイトの一部が希土類（Ｒ）原子で置換された、希土類・アルミニウム・モノクリニック（Ｒ4Ａｌ2Ｏ9）の化学量論組成より希土類リッチな組成を有する複合酸化物の結晶相を含む溶射皮膜。【効果】ハロゲン系ガスプラズマとの反応によって発生するパーティクル量が少なく、耐プラズマエッチング性能に優れた高耐食性の溶射皮膜を形成することができ、このような溶射皮膜は、半導体製造工程において用いられるプラズマエッチング装置内の部品、部材等に形成される溶射皮膜として優れている。【選択図】図２
THERMAL SPRAY MATERIAL, METHOD FOR MANUFACTURING THE SAME, THERMAL SPRAY COATING, METHOD FOR FORMING THE SAME, AND THERMAL SPRAY MEMBER
SOLUTION: The thermal spray coating containing rare earth (R), aluminum and oxygen and also containing a crystal phase of composite oxide including rare earth and aluminum, the crystal phase of composite oxide including rare earth and aluminum including a crystal phase of composite oxide having a composition whose rare earth is richer than the stoichiometric composition of rare earth-aluminum-monoclinic (R4Al2O9) having a part of Al atom sites of the rare earth-aluminum-monoclinic (R4Al2O9) replaced by rare earth (R) atoms.EFFECT: The high corrosion resistance thermal spray coating capable of reducing the amount of particles caused by a reaction with halogen based gas plasma and excellent in plasma etching resistance performance is excellent as a thermal spray coating formed on a component and a member, etc., in a plasma etching apparatus used in a semiconductor manufacturing process.SELECTED DRAWING: Figure 2
【解決手段】希土類（Ｒ）、アルミニウム及び酸素を含有し、希土類及びアルミニウムを含有する複合酸化物の結晶相を含む溶射皮膜であり、希土類及びアルミニウムを含有する複合酸化物の結晶相が、希土類・アルミニウム・モノクリニック（Ｒ4Ａｌ2Ｏ9）のＡｌ原子のサイトの一部が希土類（Ｒ）原子で置換された、希土類・アルミニウム・モノクリニック（Ｒ4Ａｌ2Ｏ9）の化学量論組成より希土類リッチな組成を有する複合酸化物の結晶相を含む溶射皮膜。【効果】ハロゲン系ガスプラズマとの反応によって発生するパーティクル量が少なく、耐プラズマエッチング性能に優れた高耐食性の溶射皮膜を形成することができ、このような溶射皮膜は、半導体製造工程において用いられるプラズマエッチング装置内の部品、部材等に形成される溶射皮膜として優れている。【選択図】図２
THERMAL SPRAY MATERIAL, METHOD FOR MANUFACTURING THE SAME, THERMAL SPRAY COATING, METHOD FOR FORMING THE SAME, AND THERMAL SPRAY MEMBER
溶射材料及びその製造方法、溶射皮膜及びその形成方法並びに溶射部材
IWASAKI RYO (author) / HAMAYA NORIAKI (author) / TSUKATANI TOSHIHIKO (author) / TANIGUCHI YUGO (author)
2020-10-22
Patent
Electronic Resource
Japanese
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
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