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THERMAL SPRAY COATING, MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, FEEDSTOCK MATERIAL FOR THERMAL SPRAY, AND METHOD FOR PRODUCING THERMAL SPRAY COATING
A thermal spray coating according to the present invention contains mainly magnesium, aluminum, oxygen, and nitrogen and has, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. The thermal spray coating is obtained by thermal spray of powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.
THERMAL SPRAY COATING, MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, FEEDSTOCK MATERIAL FOR THERMAL SPRAY, AND METHOD FOR PRODUCING THERMAL SPRAY COATING
A thermal spray coating according to the present invention contains mainly magnesium, aluminum, oxygen, and nitrogen and has, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. The thermal spray coating is obtained by thermal spray of powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.
THERMAL SPRAY COATING, MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, FEEDSTOCK MATERIAL FOR THERMAL SPRAY, AND METHOD FOR PRODUCING THERMAL SPRAY COATING
SATO YOSUKE (author) / INOUE KATSUHIRO (author) / KATSUDA YUJI (author)
2016-12-29
Patent
Electronic Resource
English
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