A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC SINTERED BODY
To provide a ceramic sintered body capable of forming a uniform temperature distribution on a placement surface.SOLUTION: The present invention provides a ceramic sintered body 10 that includes a placement surface F on which a substrate is placed, in which: the ceramics sintered body 10 is provided with a flow path 4 extending along a placement surface F at a position away from the placement surface F and flowing a medium through it; and a thermal conductivity of at least a portion of the flow path upper area X is smaller than a thermal conductivity of at least a portion of other area Y of the ceramic sintered body 10 adjacent to the flow path upper area X in a direction along the placement surface F, where a portion between the flow path 4 and the placement surface F of the ceramic sintered body 10 in a direction perpendicular to the placement surface F is defined as the flow path upper area X.SELECTED DRAWING: Figure 2
【課題】載置面に一様な温度分布を形成することができるセラミックス焼結体を提供する。【解決手段】基板が上方に載置される載置面Ｆを備えるセラミックス焼結体１０であって、セラミックス焼結体１０は、載置面Ｆから離れた位置において載置面Ｆに沿って延在し、媒体を流す流路４を備え、載置面Ｆの垂直方向におけるセラミックス焼結体１０の流路４と載置面Ｆとの間の部分を流路上部領域Ｘと定義して、流路上部領域Ｘの少なくとも一部の熱伝導率は、載置面Ｆに沿った方向においてセラミックス焼結体１０の流路上部領域Ｘに隣接する他の領域Ｙの少なくとも一部の熱伝導率よりも小さい。【選択図】図２
CERAMIC SINTERED BODY
To provide a ceramic sintered body capable of forming a uniform temperature distribution on a placement surface.SOLUTION: The present invention provides a ceramic sintered body 10 that includes a placement surface F on which a substrate is placed, in which: the ceramics sintered body 10 is provided with a flow path 4 extending along a placement surface F at a position away from the placement surface F and flowing a medium through it; and a thermal conductivity of at least a portion of the flow path upper area X is smaller than a thermal conductivity of at least a portion of other area Y of the ceramic sintered body 10 adjacent to the flow path upper area X in a direction along the placement surface F, where a portion between the flow path 4 and the placement surface F of the ceramic sintered body 10 in a direction perpendicular to the placement surface F is defined as the flow path upper area X.SELECTED DRAWING: Figure 2
【課題】載置面に一様な温度分布を形成することができるセラミックス焼結体を提供する。【解決手段】基板が上方に載置される載置面Ｆを備えるセラミックス焼結体１０であって、セラミックス焼結体１０は、載置面Ｆから離れた位置において載置面Ｆに沿って延在し、媒体を流す流路４を備え、載置面Ｆの垂直方向におけるセラミックス焼結体１０の流路４と載置面Ｆとの間の部分を流路上部領域Ｘと定義して、流路上部領域Ｘの少なくとも一部の熱伝導率は、載置面Ｆに沿った方向においてセラミックス焼結体１０の流路上部領域Ｘに隣接する他の領域Ｙの少なくとも一部の熱伝導率よりも小さい。【選択図】図２
CERAMIC SINTERED BODY
セラミックス焼結体
SATO RYOTA (author) / ICHIKAWA YOSHITAKA (author) / TSUTAI YOSHIFUMI (author)
2021-03-18
Patent
Electronic Resource
Japanese