A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
KNN FILM FORMING LIQUID COMPOSITION AND KNN FILM FORMING METHOD
To provide a KNN film forming liquid composition that does not contain lead and is capable of forming a dense KNN film, and a KNN film forming method using the liquid composition.SOLUTION: A KNN film forming liquid composition includes a solvent, an organic potassium compound, an organic sodium compound, and an organic niobium compound, and the solvent is a mixed solvent containing a carboxylic acid and a carboxylic acid ester, the carboxylic acid is a compound represented by the general formula CxH2x+1COOH (where x satisfies 4≤x≤8). The carboxylic acid ester is a compound represented by the general formula CyH2y+1COOCzH2z+1 (where y satisfies 1≤y≤7, and z satisfies 1≤z≤7).SELECTED DRAWING: Figure 1
【課題】鉛を含まず、緻密なＫＮＮ膜を形成し得るＫＮＮ膜形成用液組成物及びこの液組成物を用いたＫＮＮ膜の形成方法を提供する。【解決手段】溶媒と、有機カリウム化合物と、有機ナトリウム化合物と、有機ニオブ化合物と、を含むＫＮＮ膜形成用液組成物であって、前記溶媒は、カルボン酸とカルボン酸エステルとを含む混合溶媒であり、前記カルボン酸は、一般式がＣｘＨ２ｘ＋１ＣＯＯＨ（ただし、ｘは、４≦ｘ≦８を満たす数）で表される化合物であって、前記カルボン酸エステルは、一般式がＣｙＨ２ｙ＋１ＣＯＯＣｚＨ２ｚ＋１（ただし、ｙは、１≦ｙ≦７を満たす数、ｚは、１≦ｚ≦７を満たす数）で表される化合物あることを特徴とするＫＮＮ膜形成用液組成物。【選択図】図１
KNN FILM FORMING LIQUID COMPOSITION AND KNN FILM FORMING METHOD
To provide a KNN film forming liquid composition that does not contain lead and is capable of forming a dense KNN film, and a KNN film forming method using the liquid composition.SOLUTION: A KNN film forming liquid composition includes a solvent, an organic potassium compound, an organic sodium compound, and an organic niobium compound, and the solvent is a mixed solvent containing a carboxylic acid and a carboxylic acid ester, the carboxylic acid is a compound represented by the general formula CxH2x+1COOH (where x satisfies 4≤x≤8). The carboxylic acid ester is a compound represented by the general formula CyH2y+1COOCzH2z+1 (where y satisfies 1≤y≤7, and z satisfies 1≤z≤7).SELECTED DRAWING: Figure 1
【課題】鉛を含まず、緻密なＫＮＮ膜を形成し得るＫＮＮ膜形成用液組成物及びこの液組成物を用いたＫＮＮ膜の形成方法を提供する。【解決手段】溶媒と、有機カリウム化合物と、有機ナトリウム化合物と、有機ニオブ化合物と、を含むＫＮＮ膜形成用液組成物であって、前記溶媒は、カルボン酸とカルボン酸エステルとを含む混合溶媒であり、前記カルボン酸は、一般式がＣｘＨ２ｘ＋１ＣＯＯＨ（ただし、ｘは、４≦ｘ≦８を満たす数）で表される化合物であって、前記カルボン酸エステルは、一般式がＣｙＨ２ｙ＋１ＣＯＯＣｚＨ２ｚ＋１（ただし、ｙは、１≦ｙ≦７を満たす数、ｚは、１≦ｚ≦７を満たす数）で表される化合物あることを特徴とするＫＮＮ膜形成用液組成物。【選択図】図１
KNN FILM FORMING LIQUID COMPOSITION AND KNN FILM FORMING METHOD
ＫＮＮ膜形成用液組成物及びＫＮＮ膜の形成方法
TSUJIUCHI NAOTO (author) / SOYAMA NOBUYUKI (author)
2021-07-15
Patent
Electronic Resource
Japanese
| European Patent Office | 2019
Composition for forming aluminum-containing film, and method for forming aluminum-containing film
| European Patent Office | 2015
NON-LEAD DIELECTRIC THIN FILM, COMPOSITION FOR FORMING THIS FILM, AND METHOD FOR FORMING THIS FILM
| European Patent Office | 2015
| European Patent Office | 2022