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DIELECTRIC COMPOSITION, DIELECTRIC THIN FILM, DIELECTRIC ELEMENT, AND ELECTRONIC CIRCUIT BOARD
To provide a dielectric composition having excellent reliability, which can solve a problem of deterioration in reliability due to deterioration in insulation properties under a hydrogen atmosphere.SOLUTION: A dielectric composition has a main component represented by a composition formula of (Sr1-xCax)m(Ti1-yHfy)O3-δNδ. A dielectric element has a dielectric thin film 13; and an electrode. 0.15<δ≤0.05 are satisfied.SELECTED DRAWING: Figure 1
【課題】誘電体薄膜に関して水素雰囲気下での絶縁性の低下による信頼性の低下が課題となっており、信頼性に優れた誘電体組成物を提供する。【解決手段】組成式（Ｓｒ１−ｘＣａｘ）ｍ（Ｔｉ１−ｙＨｆｙ）Ｏ３−δＮδで表される主成分を有する誘電体組成物、誘電体薄膜１３、および電極を有する誘電体素子である。０．１５＜ｘ≦０．９０、０＜ｙ≦０．１５、０．９０≦ｍ≦１．１５、０＜δ≦０．０５を満たす。【選択図】図１
DIELECTRIC COMPOSITION, DIELECTRIC THIN FILM, DIELECTRIC ELEMENT, AND ELECTRONIC CIRCUIT BOARD
To provide a dielectric composition having excellent reliability, which can solve a problem of deterioration in reliability due to deterioration in insulation properties under a hydrogen atmosphere.SOLUTION: A dielectric composition has a main component represented by a composition formula of (Sr1-xCax)m(Ti1-yHfy)O3-δNδ. A dielectric element has a dielectric thin film 13; and an electrode. 0.15<δ≤0.05 are satisfied.SELECTED DRAWING: Figure 1
【課題】誘電体薄膜に関して水素雰囲気下での絶縁性の低下による信頼性の低下が課題となっており、信頼性に優れた誘電体組成物を提供する。【解決手段】組成式（Ｓｒ１−ｘＣａｘ）ｍ（Ｔｉ１−ｙＨｆｙ）Ｏ３−δＮδで表される主成分を有する誘電体組成物、誘電体薄膜１３、および電極を有する誘電体素子である。０．１５＜ｘ≦０．９０、０＜ｙ≦０．１５、０．９０≦ｍ≦１．１５、０＜δ≦０．０５を満たす。【選択図】図１
DIELECTRIC COMPOSITION, DIELECTRIC THIN FILM, DIELECTRIC ELEMENT, AND ELECTRONIC CIRCUIT BOARD
誘電体組成物、誘電体薄膜、誘電体素子および電子回路基板
ASAHI TOSHIO (author) / MINAMIKAZE MASAMITSU (author) / FURUKAWA MASAHITO (author) / SAIDA HITOSHI (author)
2021-09-16
Patent
Electronic Resource
Japanese
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