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A platform for research: civil engineering, architecture and urbanism
METHOD FOR PREPARING ITO CERAMIC TARGET MATERIAL WITH CONTROLLABLE GRAIN SIZE
To provide an ITO ceramic target material having a high density, a low resistivity, fine crystal grains, and a uniform particle size distribution.SOLUTION: A method for preparing ITO ceramic target material, comprising: a mixing step in which In2O3 powders having a mass number of 90-97 and SnO2 powders having a mass number of 10-3 are ball-milled with deionized water, diluents, adhesives, and polymeric materials using a sand mill to obtain ITO ceramic slurry having solid content between 70-80% and viscosity between 120-300 mPa-s, and to control the average particle size D50 of the mixed powder between 100-300 nm; a pressurized casting step in which an ITO ceramic slurry is formed by pressurized casting to obtain a green body of ITO ceramic having a relative density of 58-62%; and a sintering step in which the ITO ceramic green body is processed by integrated dewaxing and sintering to produce an ITO ceramic target material.SELECTED DRAWING: Figure 1
【課題】密度が高く、抵抗率が低く、結晶粒が細かくて粒度分布が均一なＩＴＯセラミックターゲット材を提供する。【解決手段】質量部数が９０〜９７であるＩｎ２Ｏ３粉体および質量部数が１０〜３であるＳｎＯ２粉体を、脱イオン水、希釈剤、粘着剤および高分子材料と、サンドミルでボールミル混合し、固体含有量が７０〜８０％の間にあり、粘度が１２０〜３００ｍＰａ・ｓの間にあるＩＴＯセラミックスラリーを取得し、且つ、混合粉体の平均粒径Ｄ５０を１００〜３００ｎｍに制御するステップと、加圧鋳込によりＩＴＯセラミックスラリーを形成し、相対密度が５８〜６２％であるＩＴＯセラミックのグリーン体を取得するステップと、一体化脱脂焼結によりＩＴＯセラミックのグリーン体を処理して、ＩＴＯセラミックターゲット材を取得するステップを含む、ＩＴＯセラミックターゲット材の調製方法。【選択図】図１
METHOD FOR PREPARING ITO CERAMIC TARGET MATERIAL WITH CONTROLLABLE GRAIN SIZE
To provide an ITO ceramic target material having a high density, a low resistivity, fine crystal grains, and a uniform particle size distribution.SOLUTION: A method for preparing ITO ceramic target material, comprising: a mixing step in which In2O3 powders having a mass number of 90-97 and SnO2 powders having a mass number of 10-3 are ball-milled with deionized water, diluents, adhesives, and polymeric materials using a sand mill to obtain ITO ceramic slurry having solid content between 70-80% and viscosity between 120-300 mPa-s, and to control the average particle size D50 of the mixed powder between 100-300 nm; a pressurized casting step in which an ITO ceramic slurry is formed by pressurized casting to obtain a green body of ITO ceramic having a relative density of 58-62%; and a sintering step in which the ITO ceramic green body is processed by integrated dewaxing and sintering to produce an ITO ceramic target material.SELECTED DRAWING: Figure 1
【課題】密度が高く、抵抗率が低く、結晶粒が細かくて粒度分布が均一なＩＴＯセラミックターゲット材を提供する。【解決手段】質量部数が９０〜９７であるＩｎ２Ｏ３粉体および質量部数が１０〜３であるＳｎＯ２粉体を、脱イオン水、希釈剤、粘着剤および高分子材料と、サンドミルでボールミル混合し、固体含有量が７０〜８０％の間にあり、粘度が１２０〜３００ｍＰａ・ｓの間にあるＩＴＯセラミックスラリーを取得し、且つ、混合粉体の平均粒径Ｄ５０を１００〜３００ｎｍに制御するステップと、加圧鋳込によりＩＴＯセラミックスラリーを形成し、相対密度が５８〜６２％であるＩＴＯセラミックのグリーン体を取得するステップと、一体化脱脂焼結によりＩＴＯセラミックのグリーン体を処理して、ＩＴＯセラミックターゲット材を取得するステップを含む、ＩＴＯセラミックターゲット材の調製方法。【選択図】図１
METHOD FOR PREPARING ITO CERAMIC TARGET MATERIAL WITH CONTROLLABLE GRAIN SIZE
結晶粒サイズが制御可能なＩＴＯセラミックターゲット材の調製方法
HE JIJIN (author) / SUN BENSHUANG (author) / SHU YONGCHUN (author) / RYU HIROSHI (author) / CHIN KETSU (author) / ZENG XUEYUN (author)
2021-09-16
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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