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Method of Preparing ITO Ceramic Target With Controllable Grain Size
A method of preparing an ITO ceramic target includes that: In2O3 powder with mass fraction of 90˜97 and SnO2 powder with mass fraction of 10˜3 are ball-milled and mixed with deionized water, diluent, binder and polymer material by a sand mill to obtain an ITO ceramic slurry with a solid content between 70˜80% and a viscosity between 120˜300 mpa·s, with an average particle size D50 of the mixed powder controlled at 100˜300 nm; the ITO ceramic slurry is shaped by a pressure grouting to obtain an ITO ceramic green body with a relative density of 58˜62%; the ITO ceramic green body is put into a degreasing and sintering integrated furnace, and under a degreasing temperature of 700˜800° C., the ITO ceramic target is degreased in an atmospheric oxygen atmosphere for the time set to 12˜36 hours; the temperature increases from the degreasing temperature to the first sintering temperature of 1,600˜1,650° C.
Method of Preparing ITO Ceramic Target With Controllable Grain Size
A method of preparing an ITO ceramic target includes that: In2O3 powder with mass fraction of 90˜97 and SnO2 powder with mass fraction of 10˜3 are ball-milled and mixed with deionized water, diluent, binder and polymer material by a sand mill to obtain an ITO ceramic slurry with a solid content between 70˜80% and a viscosity between 120˜300 mpa·s, with an average particle size D50 of the mixed powder controlled at 100˜300 nm; the ITO ceramic slurry is shaped by a pressure grouting to obtain an ITO ceramic green body with a relative density of 58˜62%; the ITO ceramic green body is put into a degreasing and sintering integrated furnace, and under a degreasing temperature of 700˜800° C., the ITO ceramic target is degreased in an atmospheric oxygen atmosphere for the time set to 12˜36 hours; the temperature increases from the degreasing temperature to the first sintering temperature of 1,600˜1,650° C.
Method of Preparing ITO Ceramic Target With Controllable Grain Size
HE JILIN (author) / SUN BENSHUANG (author) / SHU YONGCHUN (author) / LIU YANG (author) / CHEN JIE (author) / ZENG XUEYUN (author)
2021-09-09
Patent
Electronic Resource
English
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