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BORON CARBIDE SINTERED BODY AND ETCHING APPARATUS CONTAINING THE SAME
To provide a method for producing a boron carbide sintered body having excellent properties.SOLUTION: A method for manufacturing a boron carbide sintered body, comprising a primary forming step in which a raw material is shaped to produce a green body, and a sintered body formation step in which the green body is carbonized and sintered to produce a sintered boron carbide body, wherein the raw material contains boron carbide and a sintering property improver, and wherein the sintering property improver contains boron oxide, carbon, or a combination of these. The boron carbide sintered body is made of necked boron-carbide containing particles, its thermal conductivity value measured at 400°C is less than 27 W/(m*k), and the ratio of its thermal conductivity value measured at 25°C to that measured at 800°C is 1:0.2 to 3.SELECTED DRAWING: Figure 3
【課題】優れた特性を有する炭化ホウ素焼結体の製造方法を提供する。【解決手段】原料物質を成形してグリーン体を製造する1次成形ステップと、前記グリーン体を炭化及び焼結させて炭化ホウ素焼結体を製造する焼結体形成ステップとを含み、前記原料物質は、炭化ホウ素と焼結特性改善剤を含み、前記焼結特性改善剤は、ボロンオキサイド、カーボン、またはこれらの組み合わせを含む、炭化ホウ素焼結体の製造方法。前記炭化ホウ素焼結体は、炭化ホウ素含有粒子がネッキングされたものであって、400℃で測定した熱伝導度の値が27W/(m*k)以下であり、25℃で測定した熱伝導度の値と800℃で測定した熱伝導度の値との比率が1:0.2〜3である。【選択図】図3
BORON CARBIDE SINTERED BODY AND ETCHING APPARATUS CONTAINING THE SAME
To provide a method for producing a boron carbide sintered body having excellent properties.SOLUTION: A method for manufacturing a boron carbide sintered body, comprising a primary forming step in which a raw material is shaped to produce a green body, and a sintered body formation step in which the green body is carbonized and sintered to produce a sintered boron carbide body, wherein the raw material contains boron carbide and a sintering property improver, and wherein the sintering property improver contains boron oxide, carbon, or a combination of these. The boron carbide sintered body is made of necked boron-carbide containing particles, its thermal conductivity value measured at 400°C is less than 27 W/(m*k), and the ratio of its thermal conductivity value measured at 25°C to that measured at 800°C is 1:0.2 to 3.SELECTED DRAWING: Figure 3
【課題】優れた特性を有する炭化ホウ素焼結体の製造方法を提供する。【解決手段】原料物質を成形してグリーン体を製造する1次成形ステップと、前記グリーン体を炭化及び焼結させて炭化ホウ素焼結体を製造する焼結体形成ステップとを含み、前記原料物質は、炭化ホウ素と焼結特性改善剤を含み、前記焼結特性改善剤は、ボロンオキサイド、カーボン、またはこれらの組み合わせを含む、炭化ホウ素焼結体の製造方法。前記炭化ホウ素焼結体は、炭化ホウ素含有粒子がネッキングされたものであって、400℃で測定した熱伝導度の値が27W/(m*k)以下であり、25℃で測定した熱伝導度の値と800℃で測定した熱伝導度の値との比率が1:0.2〜3である。【選択図】図3
BORON CARBIDE SINTERED BODY AND ETCHING APPARATUS CONTAINING THE SAME
炭化ホウ素焼結体及びこれを含むエッチング装置
HWANG SUNG SIC (author) / LEE JAE BUM (author) / OH JUN ROK (author) / MIN KYOUNG YEOL (author) / KIM KYUNG IN (author) / KANG JUNG KUN (author)
2021-09-30
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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|BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME
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