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A platform for research: civil engineering, architecture and urbanism
BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME
To provide a boron carbide sintered body having excellent properties, and to provide an etcher including the same at least partially.SOLUTION: A boron carbide sintered body includes necked boron carbide-containing particles. A value of thermal conductivity of the boron carbide sintered body, measured at 400°C, is 27 W/m*K or less. The boron carbide sintered body has a value of thermal conductivity in a specific range and has excellent corrosion resistance and anti-etching properties.SELECTED DRAWING: Figure 3
【課題】優れた特性を有する炭化ホウ素焼結体及びこれを少なくとも一部に含むエッチング装置を提供する.【解決手段】炭化ホウ素焼結体は、炭化ホウ素含有粒子がネッキングされたものであって、４００℃で測定した熱伝導度の値が約２７Ｗ／（ｍ＊ｋ）以下であるなどの特徴を有する。前記炭化ホウ素焼結体は、特定の範囲内の熱伝導度の値を有し、優れた耐食性、耐エッチング特性を有する。【選択図】図３
BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME
To provide a boron carbide sintered body having excellent properties, and to provide an etcher including the same at least partially.SOLUTION: A boron carbide sintered body includes necked boron carbide-containing particles. A value of thermal conductivity of the boron carbide sintered body, measured at 400°C, is 27 W/m*K or less. The boron carbide sintered body has a value of thermal conductivity in a specific range and has excellent corrosion resistance and anti-etching properties.SELECTED DRAWING: Figure 3
【課題】優れた特性を有する炭化ホウ素焼結体及びこれを少なくとも一部に含むエッチング装置を提供する.【解決手段】炭化ホウ素焼結体は、炭化ホウ素含有粒子がネッキングされたものであって、４００℃で測定した熱伝導度の値が約２７Ｗ／（ｍ＊ｋ）以下であるなどの特徴を有する。前記炭化ホウ素焼結体は、特定の範囲内の熱伝導度の値を有し、優れた耐食性、耐エッチング特性を有する。【選択図】図３
BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME
炭化ホウ素焼結体及びこれを含むエッチング装置
HWANG SUNG SIC (author) / LEE JAE BUM (author) / OH JUN ROK (author) / MIN KYOUNG YEOL (author) / KIM KYUNG IN (author) / KANG JUNG KUN (author)
2020-05-14
Patent
Electronic Resource
Japanese
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