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PRODUCTION METHOD OF VACUUM CHAMBER MEMBER
To provide a production method for reliably producing a vacuum chamber member which can be reduced in weight in a simple process.SOLUTION: A production method is provided for producing a vacuum chamber member with a chamber inner surface as a vacuum side being formed of a first plate made of an inorganic material, and a surface facing the vacuum side of the first plate being formed of a second plate made of a composite material. The method comprises: a first step P10 of creating a shape of an inorganic material which is an object of a structure including an inorganic material and a composite material; and a second step P20 of performing prescribed finishing treatment on the inorganic material after being subjected to the first step, thus finishing the shape of the inorganic material.SELECTED DRAWING: Figure 11
【課題】軽量化を図ることが可能な真空チャンバ部材を簡素な工程で確実に製造する方法を提供する。【解決手段】真空チャンバ部材の真空側となるチャンバ内面が無機材の第一の板で構成され、第一の板の真空側と対抗する面が複合材で構成された第二の板で構成される真空チャンバの製造方法において、無機材と複合材とを有する構造の物体である無機材の形状を創生する第一工程Ｐ１０と、第一工程を経た無機材に所定の仕上げ処理を行うことで無機材の形状を仕上げする第二工程Ｐ２０とを有するように構成する。【選択図】図１１
PRODUCTION METHOD OF VACUUM CHAMBER MEMBER
To provide a production method for reliably producing a vacuum chamber member which can be reduced in weight in a simple process.SOLUTION: A production method is provided for producing a vacuum chamber member with a chamber inner surface as a vacuum side being formed of a first plate made of an inorganic material, and a surface facing the vacuum side of the first plate being formed of a second plate made of a composite material. The method comprises: a first step P10 of creating a shape of an inorganic material which is an object of a structure including an inorganic material and a composite material; and a second step P20 of performing prescribed finishing treatment on the inorganic material after being subjected to the first step, thus finishing the shape of the inorganic material.SELECTED DRAWING: Figure 11
【課題】軽量化を図ることが可能な真空チャンバ部材を簡素な工程で確実に製造する方法を提供する。【解決手段】真空チャンバ部材の真空側となるチャンバ内面が無機材の第一の板で構成され、第一の板の真空側と対抗する面が複合材で構成された第二の板で構成される真空チャンバの製造方法において、無機材と複合材とを有する構造の物体である無機材の形状を創生する第一工程Ｐ１０と、第一工程を経た無機材に所定の仕上げ処理を行うことで無機材の形状を仕上げする第二工程Ｐ２０とを有するように構成する。【選択図】図１１
PRODUCTION METHOD OF VACUUM CHAMBER MEMBER
真空チャンバ部材の製造方法
KUBO HIROYOSHI (author)
2021-12-27
Patent
Electronic Resource
Japanese
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