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A platform for research: civil engineering, architecture and urbanism
ALUMINUM NITRIDE SINTERED BODY, AND ELECTROSTATIC CHUCK
To provide an aluminum nitride sintered body exhibiting excellent insulation in a high temperature region, and an electrostatic chuck.SOLUTION: The aluminum nitride sintered body is mainly composed of aluminum nitride (AlN), and includes a composite oxide (R-Al composite oxide) containing a rare earth element and aluminum, and magnesium oxide (MgO), wherein the R-Al composite oxide and the magnesium oxide are present between particles of the aluminum nitride, and the volume resistivity thereof at 600°C is 1.0×109 Ωcm or more and 1.0×1012 Ωcm or less.SELECTED DRAWING: Figure 2
【課題】高温領域における絶縁性に優れた窒化アルミニウム焼結体及び静電チャックを提供する。【解決手段】窒化アルミニウム（ＡｌＮ）を主成分とし、希土類元素及びアルミニウムを含む複合酸化物（Ｒ－Ａｌ複合酸化物）と、酸化マグネシウム（ＭｇＯ）と、を含み、前記窒化アルミニウムの粒子間に、前記Ｒ－Ａｌ複合酸化物及び前記酸化マグネシウムが存在しており、６００℃における体積抵抗率が、１．０×１０９Ωｃｍ以上１．０×１０１２Ωｃｍ以下である、窒化アルミニウム焼結体。【選択図】図２
ALUMINUM NITRIDE SINTERED BODY, AND ELECTROSTATIC CHUCK
To provide an aluminum nitride sintered body exhibiting excellent insulation in a high temperature region, and an electrostatic chuck.SOLUTION: The aluminum nitride sintered body is mainly composed of aluminum nitride (AlN), and includes a composite oxide (R-Al composite oxide) containing a rare earth element and aluminum, and magnesium oxide (MgO), wherein the R-Al composite oxide and the magnesium oxide are present between particles of the aluminum nitride, and the volume resistivity thereof at 600°C is 1.0×109 Ωcm or more and 1.0×1012 Ωcm or less.SELECTED DRAWING: Figure 2
【課題】高温領域における絶縁性に優れた窒化アルミニウム焼結体及び静電チャックを提供する。【解決手段】窒化アルミニウム（ＡｌＮ）を主成分とし、希土類元素及びアルミニウムを含む複合酸化物（Ｒ－Ａｌ複合酸化物）と、酸化マグネシウム（ＭｇＯ）と、を含み、前記窒化アルミニウムの粒子間に、前記Ｒ－Ａｌ複合酸化物及び前記酸化マグネシウムが存在しており、６００℃における体積抵抗率が、１．０×１０９Ωｃｍ以上１．０×１０１２Ωｃｍ以下である、窒化アルミニウム焼結体。【選択図】図２
ALUMINUM NITRIDE SINTERED BODY, AND ELECTROSTATIC CHUCK
窒化アルミニウム焼結体及び静電チャック
NORITAKE MASANOBU (author) / WATANABE HIROFUMI (author) / HISHIDA TOMOKO (author) / KATO HIROTAKA (author)
2022-04-04
Patent
Electronic Resource
Japanese
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