A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
A composite sintered body of ceramic including aluminum oxide, which is the main phase, and silicon carbide, which is a secondary phase, the composite sintered body having mullite in crystal grains of aluminum oxide.
L'invention concerne un corps fritté composite de céramique comprenant de l'oxyde d'aluminium, qui est la phase principale, et du carbure de silicium, qui est une phase secondaire, le corps fritté composite ayant de la mullite dans des grains cristallins d'oxyde d'aluminium.
主相である酸化アルミニウムと、副相である炭化ケイ素と、を含むセラミックスの複合焼結体であり、酸化アルミニウムの結晶粒内にムライトを有する複合焼結体。
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
A composite sintered body of ceramic including aluminum oxide, which is the main phase, and silicon carbide, which is a secondary phase, the composite sintered body having mullite in crystal grains of aluminum oxide.
L'invention concerne un corps fritté composite de céramique comprenant de l'oxyde d'aluminium, qui est la phase principale, et du carbure de silicium, qui est une phase secondaire, le corps fritté composite ayant de la mullite dans des grains cristallins d'oxyde d'aluminium.
主相である酸化アルミニウムと、副相である炭化ケイ素と、を含むセラミックスの複合焼結体であり、酸化アルミニウムの結晶粒内にムライトを有する複合焼結体。
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
CORPS FRITTÉ COMPOSITE, ÉLÉMENT DE MANDRIN ÉLECTROSTATIQUE ET DISPOSITIF DE MANDRIN ÉLECTROSTATIQUE
複合焼結体、静電チャック部材および静電チャック装置
HIDAKA NOBUHIRO (author) / KUGIMOTO HIRONORI (author)
2019-01-03
Patent
Electronic Resource
Japanese
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