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LASER RAMAN SPECTROSCOPIC ANALYSIS METHOD AND MANUFACTURING METHOD FOR CERAMIC PRODUCT WITH FEEDBACK OF OBTAINED RESULT
To provide a laser Raman spectroscopic analysis method capable of preventing the generation of stray light to perform highly sensitive analysis when detecting and analyzing an angle of scattered light with respect to laser incident light at a direction of 90° for an opaque sample, in the laser Raman spectroscopic analysis method.SOLUTION: A laser Raman spectroscopic method comprises: irradiating an analysis surface W1 formed on a plane of a sample W, which is an opaque body, with a laser beam as incident light; passing scattered light generated from the sample through a condensing lens that is arranged at an angle of 90° to an optical axis of the incident light and whose main surface is parallel to the optical axis of the incident light; and converting the scattered light into a spectrum after spectroscopy and detection, thereby performing analysis, where an inclination angle of an analysis surface of the sample with respect to the incident light is less than 1/2 of an angle formed by a line connecting a center of a main surface of the condensing lens and an edge part of the main surface of the condensing lens, and a line connecting an intersection between the analysis surface of the sample and the optical axis of the incident light and the end part of the main surface of the condensing lens.SELECTED DRAWING: Figure 2
【課題】レーザラマン分光分析法において、不透明体の試料に対し、レーザ入射光に対する散乱光の角度を90°の方向で検出し分析する場合に、迷光の発生を予防し、高感度に分析することのできるレーザラマン分光分析法を提供する。【解決手段】不透明体である試料W上の平面に形成された分析面W1にレーザ光を入射光として照射し、試料から発生する散乱光を入射光の光軸に対し90°の方向で、前記入射光の光軸に対し主面が平行に配置された集光レンズを通過し、分光、検出後スペクトル化することで分析を行うレーザラマン分光分析法であって、前記入射光に対する前記試料の分析面の傾斜角度を、前記集光レンズの主面中心と、前記集光レンズの主面端部とを結ぶ線と、前記試料の分析面と入射光の光軸との交点と、前記集光レンズの主面端部とを結ぶ線と、により形成される角度の1/2未満とする。【選択図】図2
LASER RAMAN SPECTROSCOPIC ANALYSIS METHOD AND MANUFACTURING METHOD FOR CERAMIC PRODUCT WITH FEEDBACK OF OBTAINED RESULT
To provide a laser Raman spectroscopic analysis method capable of preventing the generation of stray light to perform highly sensitive analysis when detecting and analyzing an angle of scattered light with respect to laser incident light at a direction of 90° for an opaque sample, in the laser Raman spectroscopic analysis method.SOLUTION: A laser Raman spectroscopic method comprises: irradiating an analysis surface W1 formed on a plane of a sample W, which is an opaque body, with a laser beam as incident light; passing scattered light generated from the sample through a condensing lens that is arranged at an angle of 90° to an optical axis of the incident light and whose main surface is parallel to the optical axis of the incident light; and converting the scattered light into a spectrum after spectroscopy and detection, thereby performing analysis, where an inclination angle of an analysis surface of the sample with respect to the incident light is less than 1/2 of an angle formed by a line connecting a center of a main surface of the condensing lens and an edge part of the main surface of the condensing lens, and a line connecting an intersection between the analysis surface of the sample and the optical axis of the incident light and the end part of the main surface of the condensing lens.SELECTED DRAWING: Figure 2
【課題】レーザラマン分光分析法において、不透明体の試料に対し、レーザ入射光に対する散乱光の角度を90°の方向で検出し分析する場合に、迷光の発生を予防し、高感度に分析することのできるレーザラマン分光分析法を提供する。【解決手段】不透明体である試料W上の平面に形成された分析面W1にレーザ光を入射光として照射し、試料から発生する散乱光を入射光の光軸に対し90°の方向で、前記入射光の光軸に対し主面が平行に配置された集光レンズを通過し、分光、検出後スペクトル化することで分析を行うレーザラマン分光分析法であって、前記入射光に対する前記試料の分析面の傾斜角度を、前記集光レンズの主面中心と、前記集光レンズの主面端部とを結ぶ線と、前記試料の分析面と入射光の光軸との交点と、前記集光レンズの主面端部とを結ぶ線と、により形成される角度の1/2未満とする。【選択図】図2
LASER RAMAN SPECTROSCOPIC ANALYSIS METHOD AND MANUFACTURING METHOD FOR CERAMIC PRODUCT WITH FEEDBACK OF OBTAINED RESULT
レーザラマン分光分析法及びそこで得られた結果をフィードバックしたセラミックス製品の製造方法
HAMANO TSUTOMU (author)
2023-06-21
Patent
Electronic Resource
Japanese
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