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ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND MANUFACTURING METHOD FOR ELECTROSTATIC CHUCK MEMBER
To provide an electrostatic chuck member, an electrostatic chuck device, and a manufacturing method for an electrostatic chuck member, which facilitate uniform temperature distribution on a wafer.SOLUTION: An electrostatic chuck member includes: a dielectric substrate provided with a mounting surface on which a sample is to be mounted and in which a direction perpendicular to the mounting surface is set to the thickness direction; and a suction electrode embedded inside the dielectric substrate. A gas flow path extending along a plane direction of the mounting surface is provided inside the dielectric substrate. The inner surface of the gas flow path has a bottom part facing the same direction as the mounting surface, a top part facing the bottom part, and a pair of side parts connecting the bottom part and the top part. At least one of the pair of the side parts is inclined with respect to the thickness direction.SELECTED DRAWING: Figure 1
【課題】ウエハの温度分布を均一にしやすい静電チャック部材、静電チャック装置、および静電チャック部材の製造方法を提供する。【解決手段】試料を搭載する載置面が設けられ載置面に直交する方向を厚さ方向とする誘電体基板と、誘電体基板の内部に埋め込まれる吸着電極と、を備え、誘電体基板の内部には、載置面の平面方向に沿って延びるガス流路が設けられ、ガス流路の内側面は、載置面と同方向を向く底面部と、底面部に対向する天面部と、底面部と天面部とを繋ぐ一対の側面部と、を有し、一対の側面部の少なくとも一方は、厚さ方向に対して傾斜する、静電チャック部材。【選択図】図１
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND MANUFACTURING METHOD FOR ELECTROSTATIC CHUCK MEMBER
To provide an electrostatic chuck member, an electrostatic chuck device, and a manufacturing method for an electrostatic chuck member, which facilitate uniform temperature distribution on a wafer.SOLUTION: An electrostatic chuck member includes: a dielectric substrate provided with a mounting surface on which a sample is to be mounted and in which a direction perpendicular to the mounting surface is set to the thickness direction; and a suction electrode embedded inside the dielectric substrate. A gas flow path extending along a plane direction of the mounting surface is provided inside the dielectric substrate. The inner surface of the gas flow path has a bottom part facing the same direction as the mounting surface, a top part facing the bottom part, and a pair of side parts connecting the bottom part and the top part. At least one of the pair of the side parts is inclined with respect to the thickness direction.SELECTED DRAWING: Figure 1
【課題】ウエハの温度分布を均一にしやすい静電チャック部材、静電チャック装置、および静電チャック部材の製造方法を提供する。【解決手段】試料を搭載する載置面が設けられ載置面に直交する方向を厚さ方向とする誘電体基板と、誘電体基板の内部に埋め込まれる吸着電極と、を備え、誘電体基板の内部には、載置面の平面方向に沿って延びるガス流路が設けられ、ガス流路の内側面は、載置面と同方向を向く底面部と、底面部に対向する天面部と、底面部と天面部とを繋ぐ一対の側面部と、を有し、一対の側面部の少なくとも一方は、厚さ方向に対して傾斜する、静電チャック部材。【選択図】図１
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND MANUFACTURING METHOD FOR ELECTROSTATIC CHUCK MEMBER
静電チャック部材、静電チャック装置、および静電チャック部材の製造方法
ICHIYOSHI TAKU (author) / OTSUKA TAKASHI (author) / INUI BINSHO (author)
2023-07-06
Patent
Electronic Resource
Japanese
| European Patent Office | 2023
| European Patent Office | 2023
| European Patent Office | 2023
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2023
ELECTROSTATIC CHUCK MEMBER AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2023