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A platform for research: civil engineering, architecture and urbanism
SINTERED BODY AND METHOD OF MANUFACTURING SINTERED BODY
To provide a quartz glass-based sintered body exhibiting excellent plasma resistance properties, and a method of manufacturing the same.SOLUTION: The sintered body includes silicon oxide and carbon, where the sintered body has a D band peak at a wave number of 1311 cm-1 to 1371 cm-1 and a G band peak at a wave number of 1572 cm-1 to 1632 cm-1 in a Raman spectrum, and where the D band peak or the G band peak has higher intensity than a fifth peak present at a wave number of 1027 cm-1 to 1087 cm-1 in the Raman spectrum.SELECTED DRAWING: Figure 1
【課題】優れた耐プラズマ特性を示す石英ガラスベースの焼結体及びその製造方法を提供する。【解決手段】焼結体は、酸化ケイ素及び炭素を含み、ラマンスペクトルにおいて、１３１１ｃｍ－１～１３７１ｃｍ－１の波数でＤバンドピーク、及び１５７２ｃｍ－１～１６３２ｃｍ－１の波数でＧバンドピークを有し、前記Ｄバンドピークまたは前記Ｇバンドピークは、前記ラマンスペクトルの１０２７ｃｍ－１～１０８７ｃｍ－１の波数で存在する第５ピークよりも大きい強度を有する。【選択図】図１
SINTERED BODY AND METHOD OF MANUFACTURING SINTERED BODY
To provide a quartz glass-based sintered body exhibiting excellent plasma resistance properties, and a method of manufacturing the same.SOLUTION: The sintered body includes silicon oxide and carbon, where the sintered body has a D band peak at a wave number of 1311 cm-1 to 1371 cm-1 and a G band peak at a wave number of 1572 cm-1 to 1632 cm-1 in a Raman spectrum, and where the D band peak or the G band peak has higher intensity than a fifth peak present at a wave number of 1027 cm-1 to 1087 cm-1 in the Raman spectrum.SELECTED DRAWING: Figure 1
【課題】優れた耐プラズマ特性を示す石英ガラスベースの焼結体及びその製造方法を提供する。【解決手段】焼結体は、酸化ケイ素及び炭素を含み、ラマンスペクトルにおいて、１３１１ｃｍ－１～１３７１ｃｍ－１の波数でＤバンドピーク、及び１５７２ｃｍ－１～１６３２ｃｍ－１の波数でＧバンドピークを有し、前記Ｄバンドピークまたは前記Ｇバンドピークは、前記ラマンスペクトルの１０２７ｃｍ－１～１０８７ｃｍ－１の波数で存在する第５ピークよりも大きい強度を有する。【選択図】図１
SINTERED BODY AND METHOD OF MANUFACTURING SINTERED BODY
焼結体及び焼結体の製造方法
MIN KYUNGYEOL (author) / CHOI YONGSOO (author) / HWANG SUNGSIC (author) / NAM NA HYUN (author) / KIM KYUNGIN (author) / KANG JUNGKUN (author) / LEE WOO JIN (author)
2024-05-14
Patent
Electronic Resource
Japanese
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