A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
DOOR OPENING/CLOSING DEVICE AND THERMAL CLEAN CHAMBER
To provide a door opening/closing device capable of preventing dust from falling and attaching to a workpiece from a drive part of a door for opening/closing an entrance when carrying-in/carrying-out a workpiece (product) into/from an inspection chamber through the entrance, and to provide a thermal clean chamber including the door opening/closing device.SOLUTION: In a door opening/closing device 20 which opens/closes an entrance 5 by a door 6 by moving the door 6 left and right when carrying-in/carrying-out a workpiece into/from an inspection chamber 1a through the entrance 5, a drive part 21 is provided above the entrance 5 for performing opening/closing drive of the door 6, and between the drive part 21 and the entrance 5, a roof part 23 is provided so that a tip edge part 23a of the roof part is overlapped with the position of the entrance 5 in the vertical direction, and the drive part 21 is arranged closer to a base end edge part side of the roof part 23 so as not to be overlapped with the entrance 5 in the vertical direction.SELECTED DRAWING: Figure 1
【課題】検査室内に出入口を通してワーク（製品）を搬入・搬出する際に、出入口を開閉する扉の駆動部からワークに塵が落下して付着するのを防止できる扉開閉装置および扉開閉装置を備えたサーマルクリーンチャンバーを提供する。【解決手段】検査室１ａ内に出入口５を通してワークを搬入・搬出する際に、扉６を左右に移動させることで、当該扉６によって出入口５を開閉させる扉開閉装置２０であって、出入口５の上方に扉６を開閉駆動させる駆動部２１が設けられ、駆動部２１と出入口５との間に、屋根部２３が当該屋根部の先端縁部２３ａを上下方向において出入口５の位置と重なるように設けられ、駆動部２１は、上下方向において出入口５と重ならないように屋根部２３の基端縁部側に寄せて配置されている。【選択図】図１
DOOR OPENING/CLOSING DEVICE AND THERMAL CLEAN CHAMBER
To provide a door opening/closing device capable of preventing dust from falling and attaching to a workpiece from a drive part of a door for opening/closing an entrance when carrying-in/carrying-out a workpiece (product) into/from an inspection chamber through the entrance, and to provide a thermal clean chamber including the door opening/closing device.SOLUTION: In a door opening/closing device 20 which opens/closes an entrance 5 by a door 6 by moving the door 6 left and right when carrying-in/carrying-out a workpiece into/from an inspection chamber 1a through the entrance 5, a drive part 21 is provided above the entrance 5 for performing opening/closing drive of the door 6, and between the drive part 21 and the entrance 5, a roof part 23 is provided so that a tip edge part 23a of the roof part is overlapped with the position of the entrance 5 in the vertical direction, and the drive part 21 is arranged closer to a base end edge part side of the roof part 23 so as not to be overlapped with the entrance 5 in the vertical direction.SELECTED DRAWING: Figure 1
【課題】検査室内に出入口を通してワーク（製品）を搬入・搬出する際に、出入口を開閉する扉の駆動部からワークに塵が落下して付着するのを防止できる扉開閉装置および扉開閉装置を備えたサーマルクリーンチャンバーを提供する。【解決手段】検査室１ａ内に出入口５を通してワークを搬入・搬出する際に、扉６を左右に移動させることで、当該扉６によって出入口５を開閉させる扉開閉装置２０であって、出入口５の上方に扉６を開閉駆動させる駆動部２１が設けられ、駆動部２１と出入口５との間に、屋根部２３が当該屋根部の先端縁部２３ａを上下方向において出入口５の位置と重なるように設けられ、駆動部２１は、上下方向において出入口５と重ならないように屋根部２３の基端縁部側に寄せて配置されている。【選択図】図１
DOOR OPENING/CLOSING DEVICE AND THERMAL CLEAN CHAMBER
扉開閉装置およびサーマルクリーンチャンバー
TOYODA TAKAHIRO (author) / MARUYAMA AKIHIRO (author) / OKANO HIROSHI (author) / NAKANO SHINGO (author) / TAGUCHI SUGAKI (author)
2024-08-28
Patent
Electronic Resource
Japanese
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