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SILICON NITRIDE PLATE AND PRODUCTION METHOD THEREOF
To efficiently obtain a silicon nitride plate having a plurality of thicknesses, including small thicknesses, while suppressing cracks, dents, and deformation, regardless of a size of an area.SOLUTION: A production method of a silicon nitride plate is provided in which a plurality of thicknesses of the plate are obtained by laminating green sheets having a plurality of thicknesses via a separating agent, sintering, and peeling off after the sintering. Among the green sheets with a plurality of thicknesses, at least one type of the green sheet is a first green sheet with a thickness of 0.15 mm or less, and at least one type of the green sheet is a second green sheet which has a thickness of 0.2 mm or more, and is coated with a separating agent on the surface thereof. It is preferable that the second green sheet having the surface coated with the separating agent and the first green sheet having the surface not coated with the separating agent are alternately laminated.SELECTED DRAWING: Figure 1
【課題】厚さが小さいものも含みうる複数種の厚さの窒化ケイ素板を、割れ、凹み及び変形を抑制しつつ、面積の大小に関わらず効率よく得る。【解決手段】複数種の厚さのグリーンシートを分離剤を介して積層して焼結し、焼結後の分離によって複数種の厚さの窒化ケイ素板を得ることを特徴とする窒化ケイ素板の製造方法である。複数種の厚さのグリーンシートのうち、少なくとも１種は厚さが０．１５ｍｍ以下である第１のグリーンシートであり、かつ、少なくとも１種は厚さが０．２ｍｍ以上である第２のグリーンシートであり、表面に分離剤を塗布した前記第２のグリーンシートと、表面に分離剤を塗布しない前記第１のグリーンシートとを、交互に積層することが好ましい。【選択図】図１
SILICON NITRIDE PLATE AND PRODUCTION METHOD THEREOF
To efficiently obtain a silicon nitride plate having a plurality of thicknesses, including small thicknesses, while suppressing cracks, dents, and deformation, regardless of a size of an area.SOLUTION: A production method of a silicon nitride plate is provided in which a plurality of thicknesses of the plate are obtained by laminating green sheets having a plurality of thicknesses via a separating agent, sintering, and peeling off after the sintering. Among the green sheets with a plurality of thicknesses, at least one type of the green sheet is a first green sheet with a thickness of 0.15 mm or less, and at least one type of the green sheet is a second green sheet which has a thickness of 0.2 mm or more, and is coated with a separating agent on the surface thereof. It is preferable that the second green sheet having the surface coated with the separating agent and the first green sheet having the surface not coated with the separating agent are alternately laminated.SELECTED DRAWING: Figure 1
【課題】厚さが小さいものも含みうる複数種の厚さの窒化ケイ素板を、割れ、凹み及び変形を抑制しつつ、面積の大小に関わらず効率よく得る。【解決手段】複数種の厚さのグリーンシートを分離剤を介して積層して焼結し、焼結後の分離によって複数種の厚さの窒化ケイ素板を得ることを特徴とする窒化ケイ素板の製造方法である。複数種の厚さのグリーンシートのうち、少なくとも１種は厚さが０．１５ｍｍ以下である第１のグリーンシートであり、かつ、少なくとも１種は厚さが０．２ｍｍ以上である第２のグリーンシートであり、表面に分離剤を塗布した前記第２のグリーンシートと、表面に分離剤を塗布しない前記第１のグリーンシートとを、交互に積層することが好ましい。【選択図】図１
SILICON NITRIDE PLATE AND PRODUCTION METHOD THEREOF
窒化ケイ素板及びその製造方法
MATSUMOTO OSAMU (author) / TAKAHASHI MITSUTAKA (author)
2024-09-30
Patent
Electronic Resource
Japanese
IPC:
C04B
Kalk
,
LIME
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