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METHOD AND APPARATUS FOR FABRICATING SILICON CARBIDE

Abstract

탄화 규소의 제조방법 및 제조 장치가 개시된다. 탄화 규소의 제조방법은 탄소를 포함하는 고상 탄소원 입자들을 제공하는 단계; 및 상기 탄소원 입자들에 규소를 포함하는 규소원 기체를 공급하는 단계를 포함한다.

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METHOD AND APPARATUS FOR FABRICATING SILICON CARBIDE

Abstract

METHOD AND APPARATUS FOR FABRICATING SILICON CARBIDE

Abstract

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Title:

METHOD AND APPARATUS FOR FABRICATING SILICON CARBIDE

Additional title:

탄화 규소의 제조방법 및 제조장치

Publication date:

2018-12-24

Type of media:

Patent

Type of material:

Electronic Resource

Language:

Korean

Classification:

IPC: C04B Kalk , LIME / B01J Chemische oder physikalische Verfahren, z.B. Katalyse oder Kolloidchemie , CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY

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