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FERROELECTRIC THIN FILM-FORMING SOL-GEL SOLUTION
이 강유전체 박막 형성용 졸겔액은, PZT 계 화합물과, 폴리비닐피롤리돈을 함유하는 점도 조정용 고분자 화합물과, N-메틸피롤리돈을 함유하는 유기 도펀트를 함유하고, PZT 계 화합물이 산화물 환산으로 17 질량% 이상 함유되고, 상기 PZT 계 화합물에 대한 폴리비닐피롤리돈의 몰비가 모노머 환산으로 PZT 계 화합물 : 폴리비닐피롤리돈 = 1 : 0.1 ∼ 0.5 이며, N-메틸피롤리돈이 상기 졸겔액의 3 질량% ∼ 13 질량% 함유된다.
This ferroelectric thin film-forming sol-gel solution contains: a PZT-based compound; a high-molecular compound used to adjust the viscosity containing polyvinyl pyrrolidone; and an organic dopant containing N-methyl pyrrolidone, in which the amount of the PZT-based compound is greater than or equal to 17 mass% in terms of oxides, the molar ratio (PZT-based compound:polyvinyl pyrrolidone) of the polyvinyl pyrrolidone to the PZT-based compound is 1:0.1 to 1:0.5 in terms of monomers, and the amount of the organic dopant containing N-methyl pyrrolidone in the sol-gel solution is 3 mass% to 13 mass%.
FERROELECTRIC THIN FILM-FORMING SOL-GEL SOLUTION
이 강유전체 박막 형성용 졸겔액은, PZT 계 화합물과, 폴리비닐피롤리돈을 함유하는 점도 조정용 고분자 화합물과, N-메틸피롤리돈을 함유하는 유기 도펀트를 함유하고, PZT 계 화합물이 산화물 환산으로 17 질량% 이상 함유되고, 상기 PZT 계 화합물에 대한 폴리비닐피롤리돈의 몰비가 모노머 환산으로 PZT 계 화합물 : 폴리비닐피롤리돈 = 1 : 0.1 ∼ 0.5 이며, N-메틸피롤리돈이 상기 졸겔액의 3 질량% ∼ 13 질량% 함유된다.
This ferroelectric thin film-forming sol-gel solution contains: a PZT-based compound; a high-molecular compound used to adjust the viscosity containing polyvinyl pyrrolidone; and an organic dopant containing N-methyl pyrrolidone, in which the amount of the PZT-based compound is greater than or equal to 17 mass% in terms of oxides, the molar ratio (PZT-based compound:polyvinyl pyrrolidone) of the polyvinyl pyrrolidone to the PZT-based compound is 1:0.1 to 1:0.5 in terms of monomers, and the amount of the organic dopant containing N-methyl pyrrolidone in the sol-gel solution is 3 mass% to 13 mass%.
FERROELECTRIC THIN FILM-FORMING SOL-GEL SOLUTION
강유전체 박막 형성용 졸겔액
2019-10-21
Patent
Electronic Resource
Korean
Composition for ferroelectric thin film formation and method for forming ferroelectric thin film
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