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Manufacturing method of silicon nitride sintered body having high thermal conductivity
The present invention relates to a method for manufacturing a silicon nitride sintered body comprising the following steps: forming mixed powder by mixing silicon nitride powder, one or more types of transition metal powder selected among Ti, Ta, W and Nb, MgO powder and Y_2O_3 powder; molding the mixed powder in a desired shape; and sintering the molded products. According to the present invention, oxygen impurities existing on the surface of silicon nitride is prevented from moving into a crystal so the amount of impurities in particles or grains can be minimized and thermal conductivity can be improved.
본 발명은, 질화규소 분말, Ti, Ta, W 및 Nb 중에서 선택된 1종 이상의 전이금속 분말, MgO 분말 및 YO분말을 혼합하여 혼합분말을 형성하는 단계와, 상기 혼합분말을 목표하는 형태로 성형하는 단계 및 성형된 결과물을 소결하는 단계를 포함하는 질화규소 소결체의 제조방법에 관한 것이다. 본 발명에 의하면, 질화규소의 표면에 존재하는 산소 불순물이 결정 내부로 이동하는 것을 억제하여 입자 또는 입계에 존재하는 불순물의 양이 최소화되고 열전도 특성을 향상시킬 수 있다.
Manufacturing method of silicon nitride sintered body having high thermal conductivity
The present invention relates to a method for manufacturing a silicon nitride sintered body comprising the following steps: forming mixed powder by mixing silicon nitride powder, one or more types of transition metal powder selected among Ti, Ta, W and Nb, MgO powder and Y_2O_3 powder; molding the mixed powder in a desired shape; and sintering the molded products. According to the present invention, oxygen impurities existing on the surface of silicon nitride is prevented from moving into a crystal so the amount of impurities in particles or grains can be minimized and thermal conductivity can be improved.
본 발명은, 질화규소 분말, Ti, Ta, W 및 Nb 중에서 선택된 1종 이상의 전이금속 분말, MgO 분말 및 YO분말을 혼합하여 혼합분말을 형성하는 단계와, 상기 혼합분말을 목표하는 형태로 성형하는 단계 및 성형된 결과물을 소결하는 단계를 포함하는 질화규소 소결체의 제조방법에 관한 것이다. 본 발명에 의하면, 질화규소의 표면에 존재하는 산소 불순물이 결정 내부로 이동하는 것을 억제하여 입자 또는 입계에 존재하는 불순물의 양이 최소화되고 열전도 특성을 향상시킬 수 있다.
Manufacturing method of silicon nitride sintered body having high thermal conductivity
열전도성이 우수한 질화규소 소결체의 제조방법
DOW HWAN SOO (author) / KIM KYOUNG HUN (author) / PARK JOO SEOK (author) / IM JONG IN (author) / KIM KYUNG JA (author) / KIM SOENG HOON (author)
2017-05-22
Patent
Electronic Resource
Korean
IPC:
C04B
Kalk
,
LIME
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