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Ceramic composites for electrostatic chuck and manufacturing method of the same
The present invention relates to a ceramic composite material for an electrostatic chuck and a manufacturing method thereof, wherein the ceramic composite material contains yttrium oxide (Y_2O_3) and aluminum oxide (Al_2O_3) at the molar ratio of 1:1-1:2, contains 0.01-10 parts by weight of one or more materials selected between magnesium oxide (MgO) and silicon oxide (SiO_2) based on the total amount of 100 parts by weight of the yttrium oxide (Y_2O_3) and the aluminum oxide (Al_2O_3) and has 96.0-99.8% of relative density. The present invention can obtain a material having high resistivity and permittivity, having a small dielectric loss, being dense, having a low surface roughness, having an excellent plasma resistance property, inhibiting occurrence of pollutant particles, having excellent mechanical properties and being stable without cracks.
본 발명은, 정전척에 사용되는 소재에 있어서, 산화이트륨(YO)과 산화알루미늄(AlO)이 1:1∼2의 몰비를 이루고, 상기 산화이트륨(YO)과 상기 산화알루미늄(AlO)의 전체 함량 100중량부에 대하여 산화마그네슘(MgO) 및 산화실리콘(SiO) 중에서 선택된 1종 이상의 물질 0.01∼10중량부를 포함하며, 상대밀도가 96.0∼99.8% 범위를 이루는 정전척용 세라믹 복합소재 및 그 제조방법에 관한 것이다. 본 발명에 의하면, 높은 비저항 및 유전율을 갖고, 유전손실이 작으며, 치밀하고, 낮은 표면조도를 가지며, 내플라즈마 특성이 우수하고, 오염입자 발생이 억제되며, 기계적 특성(mechanical properties)이 우수하고, 균열이 없는 안정한 소재를 얻을 수 있다.
Ceramic composites for electrostatic chuck and manufacturing method of the same
The present invention relates to a ceramic composite material for an electrostatic chuck and a manufacturing method thereof, wherein the ceramic composite material contains yttrium oxide (Y_2O_3) and aluminum oxide (Al_2O_3) at the molar ratio of 1:1-1:2, contains 0.01-10 parts by weight of one or more materials selected between magnesium oxide (MgO) and silicon oxide (SiO_2) based on the total amount of 100 parts by weight of the yttrium oxide (Y_2O_3) and the aluminum oxide (Al_2O_3) and has 96.0-99.8% of relative density. The present invention can obtain a material having high resistivity and permittivity, having a small dielectric loss, being dense, having a low surface roughness, having an excellent plasma resistance property, inhibiting occurrence of pollutant particles, having excellent mechanical properties and being stable without cracks.
본 발명은, 정전척에 사용되는 소재에 있어서, 산화이트륨(YO)과 산화알루미늄(AlO)이 1:1∼2의 몰비를 이루고, 상기 산화이트륨(YO)과 상기 산화알루미늄(AlO)의 전체 함량 100중량부에 대하여 산화마그네슘(MgO) 및 산화실리콘(SiO) 중에서 선택된 1종 이상의 물질 0.01∼10중량부를 포함하며, 상대밀도가 96.0∼99.8% 범위를 이루는 정전척용 세라믹 복합소재 및 그 제조방법에 관한 것이다. 본 발명에 의하면, 높은 비저항 및 유전율을 갖고, 유전손실이 작으며, 치밀하고, 낮은 표면조도를 가지며, 내플라즈마 특성이 우수하고, 오염입자 발생이 억제되며, 기계적 특성(mechanical properties)이 우수하고, 균열이 없는 안정한 소재를 얻을 수 있다.
Ceramic composites for electrostatic chuck and manufacturing method of the same
정전척용 세라믹 복합소재의 제조방법
KIM JONG YOUNG (author) / LEE SUNG MIN (author) / CHOI KI BEOM (author) / CHO WOO SEOK (author) / KIM HYUNG TAE (author)
2017-11-22
Patent
Electronic Resource
Korean
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