A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
METHOD FOR MANUFACTURING INDIUM-TIN OXIDE NANO POWDER USING LOW TEMPERATURE SINTERING
An ITO target manufacturing method using low-temperature sintering of indium oxide nanopowder of the present invention comprises: a mixing and grinding step of mixing and grinding indium oxide powder and tin oxide powder to obtain fine powder; a molding step of molding the fine powder to obtain a molded article; and a sintering step of sintering the molded article at 1400 to 1500 °C in an oxygen atmosphere to obtain a sintered body. In the ITO target manufacturing method of the present invention, the specific surface area of the mixed powder of indium oxide and tin oxide has a range of 6 to 9 m^2/g.
본 발명의 산화인듐 나노분말의 저온소결에 따른 ＩＴＯ 타겟 제조 방법은, 산화인듐 분말과 산화주석 분말을 혼합 분쇄하여 미분말을 얻는 혼합 분쇄 공정, 상기 미분말을 성형하여 성형물을 얻는 성형 공정, 및 상기 성형물을 산소 분위기 중 1400 내지 1500℃에서 소결하여 소결체를 얻는 소결 공정을 포함하는 방법으로서, 상기 산화인듐과 산화주석의 혼합 분말의 비표면적이 6 ~ 9m/g의 범위를 갖는 것을 특징으로 한다.
METHOD FOR MANUFACTURING INDIUM-TIN OXIDE NANO POWDER USING LOW TEMPERATURE SINTERING
An ITO target manufacturing method using low-temperature sintering of indium oxide nanopowder of the present invention comprises: a mixing and grinding step of mixing and grinding indium oxide powder and tin oxide powder to obtain fine powder; a molding step of molding the fine powder to obtain a molded article; and a sintering step of sintering the molded article at 1400 to 1500 °C in an oxygen atmosphere to obtain a sintered body. In the ITO target manufacturing method of the present invention, the specific surface area of the mixed powder of indium oxide and tin oxide has a range of 6 to 9 m^2/g.
본 발명의 산화인듐 나노분말의 저온소결에 따른 ＩＴＯ 타겟 제조 방법은, 산화인듐 분말과 산화주석 분말을 혼합 분쇄하여 미분말을 얻는 혼합 분쇄 공정, 상기 미분말을 성형하여 성형물을 얻는 성형 공정, 및 상기 성형물을 산소 분위기 중 1400 내지 1500℃에서 소결하여 소결체를 얻는 소결 공정을 포함하는 방법으로서, 상기 산화인듐과 산화주석의 혼합 분말의 비표면적이 6 ~ 9m/g의 범위를 갖는 것을 특징으로 한다.
METHOD FOR MANUFACTURING INDIUM-TIN OXIDE NANO POWDER USING LOW TEMPERATURE SINTERING
산화인듐 나노분말의 저온소결에 따른 ＩＴＯ 타겟 제조 방법
KIM TEA SEOK (author) / JANG SI NIK (author) / KIM SEOK YEON (author) / LEE AH REUM (author) / OH KYUNG S (author) / CHUNG TAI JOO (author) / PARK KYUNG NAHN (author)
2019-12-06
Patent
Electronic Resource
Korean
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