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Indium gallium aluminum oxide powder, indium gallium aluminum oxide target and preparation method of indium gallium aluminum oxide powder and indium gallium aluminum oxide target
The invention belongs to the technical field of target material preparation, and discloses indium gallium aluminum oxide powder, a target material and a preparation method of the powder and the target material, the indium gallium aluminum oxide powder is obtained by performing gas-water combined atomization granulation on mixed slurry containing indium oxide, gallium oxide and aluminum oxide; wherein the gas atomization air pressure of the gas-water combined atomization granulation is 0.7-1 MPa, and the included angle between the gas injection direction and the vertical downward direction is 45-55 degrees; liquid adopted by water atomization is mixed liquid of water and a dispersing agent, the pressure of the mixed liquid is 100-150MPa, and the included angle between the spraying direction of the mixed liquid and the vertical downward direction is 45-55 degrees. In the gas-water combined atomization process, water atomized liquid is changed into mixed liquid of water and a dispersing agent, so that re-agglomeration of gallium oxide is effectively avoided, the average particle size of the indium gallium aluminum oxide powder is effectively reduced, and the indium gallium aluminum oxide powder with low oxygen content, small average particle size and good sphericity is produced.
本发明属于靶材制备技术领域，公开了一种氧化铟镓铝粉体、靶材及粉体、靶材的制备方法，该氧化铟镓铝粉体，由含有氧化铟、氧化镓和氧化铝的混合浆料经过气水联合雾化造粒后得到；其中，气水联合雾化造粒的气雾化的气压为0.7‑1MPa，气体喷射方向与竖直向下方向的夹角为45‑55°；水雾化采用的液体是水和分散剂的混合液体，混合液体压力为100‑150MPa，混合液体的喷射方向与竖直向下方向的夹角为45‑55°。本发明在气水联合雾化过程中将水雾化的液体变成水和分散剂的混合液体，从而有效避免了氧化镓的重新团聚，有效降低氧化铟镓铝粉体的平均粒径，生产出低氧含量、平均粒径小、球形度好的氧化铟镓铝粉体。
Indium gallium aluminum oxide powder, indium gallium aluminum oxide target and preparation method of indium gallium aluminum oxide powder and indium gallium aluminum oxide target
The invention belongs to the technical field of target material preparation, and discloses indium gallium aluminum oxide powder, a target material and a preparation method of the powder and the target material, the indium gallium aluminum oxide powder is obtained by performing gas-water combined atomization granulation on mixed slurry containing indium oxide, gallium oxide and aluminum oxide; wherein the gas atomization air pressure of the gas-water combined atomization granulation is 0.7-1 MPa, and the included angle between the gas injection direction and the vertical downward direction is 45-55 degrees; liquid adopted by water atomization is mixed liquid of water and a dispersing agent, the pressure of the mixed liquid is 100-150MPa, and the included angle between the spraying direction of the mixed liquid and the vertical downward direction is 45-55 degrees. In the gas-water combined atomization process, water atomized liquid is changed into mixed liquid of water and a dispersing agent, so that re-agglomeration of gallium oxide is effectively avoided, the average particle size of the indium gallium aluminum oxide powder is effectively reduced, and the indium gallium aluminum oxide powder with low oxygen content, small average particle size and good sphericity is produced.
本发明属于靶材制备技术领域，公开了一种氧化铟镓铝粉体、靶材及粉体、靶材的制备方法，该氧化铟镓铝粉体，由含有氧化铟、氧化镓和氧化铝的混合浆料经过气水联合雾化造粒后得到；其中，气水联合雾化造粒的气雾化的气压为0.7‑1MPa，气体喷射方向与竖直向下方向的夹角为45‑55°；水雾化采用的液体是水和分散剂的混合液体，混合液体压力为100‑150MPa，混合液体的喷射方向与竖直向下方向的夹角为45‑55°。本发明在气水联合雾化过程中将水雾化的液体变成水和分散剂的混合液体，从而有效避免了氧化镓的重新团聚，有效降低氧化铟镓铝粉体的平均粒径，生产出低氧含量、平均粒径小、球形度好的氧化铟镓铝粉体。
Indium gallium aluminum oxide powder, indium gallium aluminum oxide target and preparation method of indium gallium aluminum oxide powder and indium gallium aluminum oxide target
一种氧化铟镓铝粉体、靶材及粉体、靶材的制备方法
GU DESHENG (author) / SHAO XUELIANG (author) / LI KAIJIE (author) / ZHANG XINGYU (author) / LUO SISHI (author)
2023-12-08
Patent
Electronic Resource
Chinese
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