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A platform for research: civil engineering, architecture and urbanism
Vanadium Oxide Thin Film and method for manufacturing the same
The present invention provides a vanadium oxide thin film and a manufacturing method thereof. While using a rapid thermal process (RTP) technology to fully utilize properties of vanadium oxide, which has phase transition characteristics, a uniform rapid heat treatment system is designed to control a composition ratio of vanadium oxide and realize large area through high uniformity, and at the same time, the vanadium oxide thin film is provided as a thermochromic material that does not contain impurities and has high transmittance. The manufacturing method of the vanadium oxide thin film includes a step of preparing a vanadium oxide deposition film; and a step of heat treating the vanadium oxide deposited film.
본 발명은 상전이 특성을 가지는 바나듐 산화물의 특성을 온전히 이용하기 위하여 급속열처리 (Rapid Thermal Process, RTP) 기술을 이용하되, 바나듐 산화물의 조성비를 제어하고 높은 균일도를 통한 대면적화를 구현할 수 있도록 균일한 급속열처리 시스템을 설계함과 동시에, 불순물이 포함되지 않고 높은 투과율을 가지는 써모크로믹(thermochromic) 재료로서의 바나듐 산화물 박막 및 이의 제조방법을 제공한다.
Vanadium Oxide Thin Film and method for manufacturing the same
The present invention provides a vanadium oxide thin film and a manufacturing method thereof. While using a rapid thermal process (RTP) technology to fully utilize properties of vanadium oxide, which has phase transition characteristics, a uniform rapid heat treatment system is designed to control a composition ratio of vanadium oxide and realize large area through high uniformity, and at the same time, the vanadium oxide thin film is provided as a thermochromic material that does not contain impurities and has high transmittance. The manufacturing method of the vanadium oxide thin film includes a step of preparing a vanadium oxide deposition film; and a step of heat treating the vanadium oxide deposited film.
본 발명은 상전이 특성을 가지는 바나듐 산화물의 특성을 온전히 이용하기 위하여 급속열처리 (Rapid Thermal Process, RTP) 기술을 이용하되, 바나듐 산화물의 조성비를 제어하고 높은 균일도를 통한 대면적화를 구현할 수 있도록 균일한 급속열처리 시스템을 설계함과 동시에, 불순물이 포함되지 않고 높은 투과율을 가지는 써모크로믹(thermochromic) 재료로서의 바나듐 산화물 박막 및 이의 제조방법을 제공한다.
Vanadium Oxide Thin Film and method for manufacturing the same
바나듐 산화물 박막 및 이의 제조방법
YANG WOO SEOK (author)
2023-06-02
Patent
Electronic Resource
Korean
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C03C
Chemische Zusammensetzungen für Gläser, Glasuren oder Emails
,
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
/
E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
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Fabrication of Thin Film Vanadium Oxide for Microbolometer
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OXIDE SPUTTERING TARGET, MANUFACTURING METHOD OF THE SAME, AND OXIDE THIN FILM
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Properties of pulsed laser deposited vanadium oxide thin film thermistor
| British Library Online Contents | 2003