A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
POWDER FOR COATING AN ETCH CHAMBER
본 발명은, 입자의 분말로서, 0.85 이상의 진원도를 나타내는 상기 입자의 수가 95%를 초과하고, 상기 분말은, 산화물에 기초하는 질량%로서, 99.8% 초과의 희토류 금속 산화물 및/또는 산화하프늄 및/또는 산화알루미늄을 포함하고, - 15㎛ 미만의 중앙 입자 크기 D50, 30㎛ 미만의 입자 크기의 90 백분위수 D90, 및 2 미만의 크기 분산 지수 (D90-D10)/D10; - 90% 초과의 상대 밀도를 갖는, 입자의 분말에 관한 것이다.
A powder of melted particles, more than 95% by number of the particles exhibiting a circularity of greater than or equal to 0.85. The powder including more than 99.8% of a rare earth metal oxide and/or of hafnium oxide and/or of an aluminum oxide, as percentage by mass based on the oxides. The powder has a median particle size D50 of less than 15 μm, a 90 percentile of the particle sizes, D90, of less than 30 μm, and a size dispersion index (D90−D10)/D10 of less than 2, and a relative density of greater than 90%. The Dn percentiles of the powder are the particle sizes corresponding to the percentages, by number, of n %, on the cumulative distribution curve of the size of the particles in the powder and the particle sizes are classified by increasing order.
POWDER FOR COATING AN ETCH CHAMBER
본 발명은, 입자의 분말로서, 0.85 이상의 진원도를 나타내는 상기 입자의 수가 95%를 초과하고, 상기 분말은, 산화물에 기초하는 질량%로서, 99.8% 초과의 희토류 금속 산화물 및/또는 산화하프늄 및/또는 산화알루미늄을 포함하고, - 15㎛ 미만의 중앙 입자 크기 D50, 30㎛ 미만의 입자 크기의 90 백분위수 D90, 및 2 미만의 크기 분산 지수 (D90-D10)/D10; - 90% 초과의 상대 밀도를 갖는, 입자의 분말에 관한 것이다.
A powder of melted particles, more than 95% by number of the particles exhibiting a circularity of greater than or equal to 0.85. The powder including more than 99.8% of a rare earth metal oxide and/or of hafnium oxide and/or of an aluminum oxide, as percentage by mass based on the oxides. The powder has a median particle size D50 of less than 15 μm, a 90 percentile of the particle sizes, D90, of less than 30 μm, and a size dispersion index (D90−D10)/D10 of less than 2, and a relative density of greater than 90%. The Dn percentiles of the powder are the particle sizes corresponding to the percentages, by number, of n %, on the cumulative distribution curve of the size of the particles in the powder and the particle sizes are classified by increasing order.
POWDER FOR COATING AN ETCH CHAMBER
에칭 챔버를 코팅하기 위한 분말
ALLIMANT ALAIN (author) / WALLAR HOWARD (author)
2024-03-19
Patent
Electronic Resource
Korean
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C01G
Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle
,
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
/
C04B
Kalk
,
LIME
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
USE OF SINTERED NANOGRAINED YTTRIUM-BASED CERAMICS AS ETCH CHAMBER COMPONENTS
| European Patent Office | 2017
USE OF SINTERED NANOGRAINED YTTRIUM-BASED CERAMICS AS ETCH CHAMBER COMPONENTS
| European Patent Office | 2017