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Composite Ceramic Composition for Manufacturing Vacuum Chuck
본 발명은 진공척 제조를 위한 복합 세라믹 조성물에 관한 것으로, 본 발명에 따른 복합 세라믹 조성물은 진공척 등의 세라믹 성형물을 제조하기에 충분한 가공성(낮은 부피밀도) 및 꺽임강도를 동시에 만족하는 효과가 있다.
Composite Ceramic Composition for Manufacturing Vacuum Chuck
본 발명은 진공척 제조를 위한 복합 세라믹 조성물에 관한 것으로, 본 발명에 따른 복합 세라믹 조성물은 진공척 등의 세라믹 성형물을 제조하기에 충분한 가공성(낮은 부피밀도) 및 꺽임강도를 동시에 만족하는 효과가 있다.
Composite Ceramic Composition for Manufacturing Vacuum Chuck
진공척 제조를 위한 복합 세라믹 조성물
JOO SEOK PARK (author) / LEE MIN HO (author) / JINWOO KIM (author)
2024-07-08
Patent
Electronic Resource
Korean
IPC:
C04B
Kalk
,
LIME
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
H01L
Halbleiterbauelemente
,
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