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Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
A method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high density thereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.
Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
A method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high density thereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.
Process for preparing ceramics, ceramics thus obtained and uses thereof, especially as a sputtering target
CAMPET GUY (author) / SAADEDDIN IYAD (author) / ZAGHIB KARIM (author)
2018-12-04
Patent
Electronic Resource
English
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